JPS55121256A - Correcting method of drift in electron microscope - Google Patents

Correcting method of drift in electron microscope

Info

Publication number
JPS55121256A
JPS55121256A JP2890579A JP2890579A JPS55121256A JP S55121256 A JPS55121256 A JP S55121256A JP 2890579 A JP2890579 A JP 2890579A JP 2890579 A JP2890579 A JP 2890579A JP S55121256 A JPS55121256 A JP S55121256A
Authority
JP
Japan
Prior art keywords
electron microscope
signal
zero
sample
manner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2890579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161221B2 (enExample
Inventor
Koro Oi
Koichi Koshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2890579A priority Critical patent/JPS55121256A/ja
Publication of JPS55121256A publication Critical patent/JPS55121256A/ja
Publication of JPS6161221B2 publication Critical patent/JPS6161221B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2890579A 1979-03-13 1979-03-13 Correcting method of drift in electron microscope Granted JPS55121256A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2890579A JPS55121256A (en) 1979-03-13 1979-03-13 Correcting method of drift in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2890579A JPS55121256A (en) 1979-03-13 1979-03-13 Correcting method of drift in electron microscope

Publications (2)

Publication Number Publication Date
JPS55121256A true JPS55121256A (en) 1980-09-18
JPS6161221B2 JPS6161221B2 (enExample) 1986-12-24

Family

ID=12261415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2890579A Granted JPS55121256A (en) 1979-03-13 1979-03-13 Correcting method of drift in electron microscope

Country Status (1)

Country Link
JP (1) JPS55121256A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60232656A (ja) * 1984-04-28 1985-11-19 Nissin Electric Co Ltd イオン注入装置
JPS63202834A (ja) * 1987-02-17 1988-08-22 Jeol Ltd 電子顕微鏡のドリフト補正装置
US4948971A (en) * 1988-11-14 1990-08-14 Amray Inc. Vibration cancellation system for scanning electron microscopes

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117569A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Sample drift correction device
JPS51134555A (en) * 1975-05-16 1976-11-22 Jeol Ltd Sample drift corrector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117569A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Sample drift correction device
JPS51134555A (en) * 1975-05-16 1976-11-22 Jeol Ltd Sample drift corrector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60232656A (ja) * 1984-04-28 1985-11-19 Nissin Electric Co Ltd イオン注入装置
JPS63202834A (ja) * 1987-02-17 1988-08-22 Jeol Ltd 電子顕微鏡のドリフト補正装置
US4948971A (en) * 1988-11-14 1990-08-14 Amray Inc. Vibration cancellation system for scanning electron microscopes

Also Published As

Publication number Publication date
JPS6161221B2 (enExample) 1986-12-24

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