JPS55116604A - Manufacture of finely powdered silicon nitride - Google Patents

Manufacture of finely powdered silicon nitride

Info

Publication number
JPS55116604A
JPS55116604A JP2537979A JP2537979A JPS55116604A JP S55116604 A JPS55116604 A JP S55116604A JP 2537979 A JP2537979 A JP 2537979A JP 2537979 A JP2537979 A JP 2537979A JP S55116604 A JPS55116604 A JP S55116604A
Authority
JP
Japan
Prior art keywords
nitrogen
argon
plasma stream
chamber
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2537979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6229364B2 (enrdf_load_stackoverflow
Inventor
Ensei Ko
Kunio Senda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP2537979A priority Critical patent/JPS55116604A/ja
Publication of JPS55116604A publication Critical patent/JPS55116604A/ja
Publication of JPS6229364B2 publication Critical patent/JPS6229364B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2537979A 1979-03-05 1979-03-05 Manufacture of finely powdered silicon nitride Granted JPS55116604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2537979A JPS55116604A (en) 1979-03-05 1979-03-05 Manufacture of finely powdered silicon nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2537979A JPS55116604A (en) 1979-03-05 1979-03-05 Manufacture of finely powdered silicon nitride

Publications (2)

Publication Number Publication Date
JPS55116604A true JPS55116604A (en) 1980-09-08
JPS6229364B2 JPS6229364B2 (enrdf_load_stackoverflow) 1987-06-25

Family

ID=12164212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2537979A Granted JPS55116604A (en) 1979-03-05 1979-03-05 Manufacture of finely powdered silicon nitride

Country Status (1)

Country Link
JP (1) JPS55116604A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950007A (ja) * 1982-09-13 1984-03-22 Toa Nenryo Kogyo Kk 窒化珪素焼結体のための前駆物質とそれを用いた窒化珪素焼結体の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128900A (en) * 1976-02-17 1977-10-28 Montedison Spa Plasmaarc method for producing particulate ceramic metal and similar products
JPS5377000A (en) * 1976-12-20 1978-07-07 Ppg Industries Inc Recovery of refractory hard alloy powdered products

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128900A (en) * 1976-02-17 1977-10-28 Montedison Spa Plasmaarc method for producing particulate ceramic metal and similar products
JPS5377000A (en) * 1976-12-20 1978-07-07 Ppg Industries Inc Recovery of refractory hard alloy powdered products

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950007A (ja) * 1982-09-13 1984-03-22 Toa Nenryo Kogyo Kk 窒化珪素焼結体のための前駆物質とそれを用いた窒化珪素焼結体の製造方法

Also Published As

Publication number Publication date
JPS6229364B2 (enrdf_load_stackoverflow) 1987-06-25

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