JPS55113609A - Manufacturing apparatus for beta crystallbase silicon carbide - Google Patents

Manufacturing apparatus for beta crystallbase silicon carbide

Info

Publication number
JPS55113609A
JPS55113609A JP1846379A JP1846379A JPS55113609A JP S55113609 A JPS55113609 A JP S55113609A JP 1846379 A JP1846379 A JP 1846379A JP 1846379 A JP1846379 A JP 1846379A JP S55113609 A JPS55113609 A JP S55113609A
Authority
JP
Japan
Prior art keywords
zone
heating
beta
silicon carbide
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1846379A
Other languages
English (en)
Other versions
JPS5748485B2 (ja
Inventor
Akira Enomoto
Michihiro Yoshioka
Takao Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Ibigawa Electric Industry Co Ltd
Original Assignee
Ibiden Co Ltd
Ibigawa Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd, Ibigawa Electric Industry Co Ltd filed Critical Ibiden Co Ltd
Priority to JP1846379A priority Critical patent/JPS55113609A/ja
Publication of JPS55113609A publication Critical patent/JPS55113609A/ja
Priority to US06/316,964 priority patent/US4390504A/en
Publication of JPS5748485B2 publication Critical patent/JPS5748485B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C01B32/97—Preparation from SiO or SiO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
JP1846379A 1979-02-21 1979-02-21 Manufacturing apparatus for beta crystallbase silicon carbide Granted JPS55113609A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1846379A JPS55113609A (en) 1979-02-21 1979-02-21 Manufacturing apparatus for beta crystallbase silicon carbide
US06/316,964 US4390504A (en) 1979-02-21 1981-10-30 Apparatus for producing silicon carbide consisting mainly of β-type crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1846379A JPS55113609A (en) 1979-02-21 1979-02-21 Manufacturing apparatus for beta crystallbase silicon carbide

Publications (2)

Publication Number Publication Date
JPS55113609A true JPS55113609A (en) 1980-09-02
JPS5748485B2 JPS5748485B2 (ja) 1982-10-16

Family

ID=11972321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1846379A Granted JPS55113609A (en) 1979-02-21 1979-02-21 Manufacturing apparatus for beta crystallbase silicon carbide

Country Status (2)

Country Link
US (1) US4390504A (ja)
JP (1) JPS55113609A (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3732073A1 (de) * 1987-09-23 1989-04-06 Siemens Ag Hochreine innenauskleidung fuer einen elektroniederschachtofen
GB2220409A (en) * 1988-04-26 1990-01-10 Central Glass Co Ltd Beta-silicon carbide powder for sintering and method of preparing same
WO1990008104A1 (en) * 1989-01-11 1990-07-26 The Dow Chemical Company Process for preparing silicon carbide
US5340417A (en) * 1989-01-11 1994-08-23 The Dow Chemical Company Process for preparing silicon carbide by carbothermal reduction
AU621989B2 (en) * 1989-01-11 1992-03-26 Dow Chemical Company, The Method and apparatus for producing boron carbide crystals
JP4871177B2 (ja) * 2006-03-28 2012-02-08 コリア インスティチュート オブ エナジー リサーチ 超音波振動方式を用いたカーボンナノチューブ合成方法とその装置
JP5730521B2 (ja) * 2010-09-08 2015-06-10 株式会社日立ハイテクノロジーズ 熱処理装置
DE102022102320A1 (de) 2022-02-01 2023-08-03 The Yellow SiC Holding GmbH Vorrichtung und Verfahren zur Produktion von Siliziumkarbid

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2178773A (en) * 1935-11-13 1939-11-07 Carborundum Co Silicon carbide and manufacture thereof
US2869990A (en) * 1956-04-02 1959-01-20 Sam Tour Process of producing carbides
FR1175273A (fr) * 1957-05-16 1959-03-23 Pechiney Four pour la production continue de nitrure d'aluminium
US3232706A (en) * 1961-05-01 1966-02-01 Carborundum Co Method of making submicron size nitrides and carbides
US3404210A (en) * 1967-06-23 1968-10-01 American Air Filter Co Melting furnace
US3933434A (en) * 1972-07-13 1976-01-20 Edwin Matovich High temperature chemical reactor

Also Published As

Publication number Publication date
JPS5748485B2 (ja) 1982-10-16
US4390504A (en) 1983-06-28

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