JPS55110126A - Preparation of antireflection film - Google Patents
Preparation of antireflection filmInfo
- Publication number
- JPS55110126A JPS55110126A JP1764979A JP1764979A JPS55110126A JP S55110126 A JPS55110126 A JP S55110126A JP 1764979 A JP1764979 A JP 1764979A JP 1764979 A JP1764979 A JP 1764979A JP S55110126 A JPS55110126 A JP S55110126A
- Authority
- JP
- Japan
- Prior art keywords
- film
- ionized
- antireflection film
- substance
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000000126 substance Substances 0.000 abstract 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229920003002 synthetic resin Polymers 0.000 abstract 2
- 239000000057 synthetic resin Substances 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1764979A JPS55110126A (en) | 1979-02-16 | 1979-02-16 | Preparation of antireflection film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1764979A JPS55110126A (en) | 1979-02-16 | 1979-02-16 | Preparation of antireflection film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55110126A true JPS55110126A (en) | 1980-08-25 |
| JPS6149387B2 JPS6149387B2 (enExample) | 1986-10-29 |
Family
ID=11949694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1764979A Granted JPS55110126A (en) | 1979-02-16 | 1979-02-16 | Preparation of antireflection film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55110126A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60225101A (ja) * | 1984-04-23 | 1985-11-09 | Minolta Camera Co Ltd | プラスチツク製光学部品 |
| JPS6243601A (ja) * | 1985-08-22 | 1987-02-25 | Kyowa Gas Chem Ind Co Ltd | 合成樹脂製光学物品の多層反射防止膜の形成方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03114882U (enExample) * | 1990-03-09 | 1991-11-26 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50118978A (enExample) * | 1974-03-04 | 1975-09-18 | ||
| JPS50148285A (enExample) * | 1974-05-02 | 1975-11-27 | ||
| JPS51117984A (en) * | 1975-04-10 | 1976-10-16 | Matsushita Electric Ind Co Ltd | Ionization plating apparatus |
-
1979
- 1979-02-16 JP JP1764979A patent/JPS55110126A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50118978A (enExample) * | 1974-03-04 | 1975-09-18 | ||
| JPS50148285A (enExample) * | 1974-05-02 | 1975-11-27 | ||
| JPS51117984A (en) * | 1975-04-10 | 1976-10-16 | Matsushita Electric Ind Co Ltd | Ionization plating apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60225101A (ja) * | 1984-04-23 | 1985-11-09 | Minolta Camera Co Ltd | プラスチツク製光学部品 |
| JPS6243601A (ja) * | 1985-08-22 | 1987-02-25 | Kyowa Gas Chem Ind Co Ltd | 合成樹脂製光学物品の多層反射防止膜の形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6149387B2 (enExample) | 1986-10-29 |
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