JPS55103402A - Linear gauge - Google Patents

Linear gauge

Info

Publication number
JPS55103402A
JPS55103402A JP1158179A JP1158179A JPS55103402A JP S55103402 A JPS55103402 A JP S55103402A JP 1158179 A JP1158179 A JP 1158179A JP 1158179 A JP1158179 A JP 1158179A JP S55103402 A JPS55103402 A JP S55103402A
Authority
JP
Japan
Prior art keywords
light
diffusion plate
flux
interference fringes
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1158179A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0210362B2 (en, 2012
Inventor
Joji Matsuda
Koji Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1158179A priority Critical patent/JPS55103402A/ja
Publication of JPS55103402A publication Critical patent/JPS55103402A/ja
Publication of JPH0210362B2 publication Critical patent/JPH0210362B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1158179A 1979-02-03 1979-02-03 Linear gauge Granted JPS55103402A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1158179A JPS55103402A (en) 1979-02-03 1979-02-03 Linear gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1158179A JPS55103402A (en) 1979-02-03 1979-02-03 Linear gauge

Publications (2)

Publication Number Publication Date
JPS55103402A true JPS55103402A (en) 1980-08-07
JPH0210362B2 JPH0210362B2 (en, 2012) 1990-03-07

Family

ID=11781866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1158179A Granted JPS55103402A (en) 1979-02-03 1979-02-03 Linear gauge

Country Status (1)

Country Link
JP (1) JPS55103402A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4466693A (en) * 1980-11-25 1984-08-21 Agency Of Industrial Science And Technology Holographic straightness meter
JP2007101491A (ja) * 2005-10-07 2007-04-19 Mitsutoyo Corp 変位センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4466693A (en) * 1980-11-25 1984-08-21 Agency Of Industrial Science And Technology Holographic straightness meter
JP2007101491A (ja) * 2005-10-07 2007-04-19 Mitsutoyo Corp 変位センサ

Also Published As

Publication number Publication date
JPH0210362B2 (en, 2012) 1990-03-07

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