JPS55100241A - Metal oxide film etching method - Google Patents
Metal oxide film etching methodInfo
- Publication number
- JPS55100241A JPS55100241A JP338479A JP338479A JPS55100241A JP S55100241 A JPS55100241 A JP S55100241A JP 338479 A JP338479 A JP 338479A JP 338479 A JP338479 A JP 338479A JP S55100241 A JPS55100241 A JP S55100241A
- Authority
- JP
- Japan
- Prior art keywords
- metal oxide
- etching
- oxide film
- soln
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
PURPOSE: To safely perform etching of a metal oxide film at a high and stable etching speed while reducing contamination of an etching soln. and improving accuracy and uniformity by applying hydrogen generated by electrolysis to metal oxide on the surface of a substrate.
CONSTITUTION: Metal oxide on the surface of a substrate such as glass is etched with hydrogen generated by electrolysis. For example, 6H HCl as an etching soln., a carbon anode and a platinum cathode are used. The temp. of the soln. is adjusted to 40°C, and etching time to 10sec. The cathode and the sample to be etched are pref. made equal in size so that hydrogen generated from the cathode is uniformly applied to the sample.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP338479A JPS55100241A (en) | 1979-01-18 | 1979-01-18 | Metal oxide film etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP338479A JPS55100241A (en) | 1979-01-18 | 1979-01-18 | Metal oxide film etching method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55100241A true JPS55100241A (en) | 1980-07-31 |
Family
ID=11555855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP338479A Pending JPS55100241A (en) | 1979-01-18 | 1979-01-18 | Metal oxide film etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55100241A (en) |
-
1979
- 1979-01-18 JP JP338479A patent/JPS55100241A/en active Pending
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