JPS5488781A - Transistor logic of electrostatic induction type - Google Patents

Transistor logic of electrostatic induction type

Info

Publication number
JPS5488781A
JPS5488781A JP15914577A JP15914577A JPS5488781A JP S5488781 A JPS5488781 A JP S5488781A JP 15914577 A JP15914577 A JP 15914577A JP 15914577 A JP15914577 A JP 15914577A JP S5488781 A JPS5488781 A JP S5488781A
Authority
JP
Japan
Prior art keywords
concave
dirt
transistor logic
induction type
electrostatic induction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15914577A
Other languages
Japanese (ja)
Inventor
Yoshiharu Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP15914577A priority Critical patent/JPS5488781A/en
Publication of JPS5488781A publication Critical patent/JPS5488781A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To avoid the deposition of dirt and the absorption of moisture, by forming PSG film at the concave of the notch type SIT(Static Induction Transistor) logic and making flat the surface.
CONSTITUTION: The notch type SIT is constituted concave for the element, then the concave is apt to be subject to the deposition of dirt and the absorption of moisture and also, Al open wire and dirt. Thus, when the concave part is burried with PSG 7, the effects can be removed and the reliability of device can be increased.
COPYRIGHT: (C)1979,JPO&Japio
JP15914577A 1977-12-26 1977-12-26 Transistor logic of electrostatic induction type Pending JPS5488781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15914577A JPS5488781A (en) 1977-12-26 1977-12-26 Transistor logic of electrostatic induction type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15914577A JPS5488781A (en) 1977-12-26 1977-12-26 Transistor logic of electrostatic induction type

Publications (1)

Publication Number Publication Date
JPS5488781A true JPS5488781A (en) 1979-07-14

Family

ID=15687229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15914577A Pending JPS5488781A (en) 1977-12-26 1977-12-26 Transistor logic of electrostatic induction type

Country Status (1)

Country Link
JP (1) JPS5488781A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02189979A (en) * 1989-01-18 1990-07-25 Mitsubishi Electric Corp Static induction type switching element and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02189979A (en) * 1989-01-18 1990-07-25 Mitsubishi Electric Corp Static induction type switching element and manufacture thereof

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