JPS5488781A - Transistor logic of electrostatic induction type - Google Patents
Transistor logic of electrostatic induction typeInfo
- Publication number
- JPS5488781A JPS5488781A JP15914577A JP15914577A JPS5488781A JP S5488781 A JPS5488781 A JP S5488781A JP 15914577 A JP15914577 A JP 15914577A JP 15914577 A JP15914577 A JP 15914577A JP S5488781 A JPS5488781 A JP S5488781A
- Authority
- JP
- Japan
- Prior art keywords
- concave
- dirt
- transistor logic
- induction type
- electrostatic induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To avoid the deposition of dirt and the absorption of moisture, by forming PSG film at the concave of the notch type SIT(Static Induction Transistor) logic and making flat the surface.
CONSTITUTION: The notch type SIT is constituted concave for the element, then the concave is apt to be subject to the deposition of dirt and the absorption of moisture and also, Al open wire and dirt. Thus, when the concave part is burried with PSG 7, the effects can be removed and the reliability of device can be increased.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15914577A JPS5488781A (en) | 1977-12-26 | 1977-12-26 | Transistor logic of electrostatic induction type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15914577A JPS5488781A (en) | 1977-12-26 | 1977-12-26 | Transistor logic of electrostatic induction type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5488781A true JPS5488781A (en) | 1979-07-14 |
Family
ID=15687229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15914577A Pending JPS5488781A (en) | 1977-12-26 | 1977-12-26 | Transistor logic of electrostatic induction type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5488781A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02189979A (en) * | 1989-01-18 | 1990-07-25 | Mitsubishi Electric Corp | Static induction type switching element and manufacture thereof |
-
1977
- 1977-12-26 JP JP15914577A patent/JPS5488781A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02189979A (en) * | 1989-01-18 | 1990-07-25 | Mitsubishi Electric Corp | Static induction type switching element and manufacture thereof |
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