JPS5441675A - Photo resist coating unit - Google Patents

Photo resist coating unit

Info

Publication number
JPS5441675A
JPS5441675A JP10780677A JP10780677A JPS5441675A JP S5441675 A JPS5441675 A JP S5441675A JP 10780677 A JP10780677 A JP 10780677A JP 10780677 A JP10780677 A JP 10780677A JP S5441675 A JPS5441675 A JP S5441675A
Authority
JP
Japan
Prior art keywords
photo resist
resist coating
coating unit
manufacure
incorporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10780677A
Other languages
Japanese (ja)
Inventor
Nobuo Sato
Yoshiharu Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10780677A priority Critical patent/JPS5441675A/en
Publication of JPS5441675A publication Critical patent/JPS5441675A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To perform the manufacure of photo resist film with the condition having no dust, by incorporating each processing means such as cleaning, drying and photo resist coating of semiconductor substrate in one package.
COPYRIGHT: (C)1979,JPO&Japio
JP10780677A 1977-09-09 1977-09-09 Photo resist coating unit Pending JPS5441675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10780677A JPS5441675A (en) 1977-09-09 1977-09-09 Photo resist coating unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10780677A JPS5441675A (en) 1977-09-09 1977-09-09 Photo resist coating unit

Publications (1)

Publication Number Publication Date
JPS5441675A true JPS5441675A (en) 1979-04-03

Family

ID=14468497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10780677A Pending JPS5441675A (en) 1977-09-09 1977-09-09 Photo resist coating unit

Country Status (1)

Country Link
JP (1) JPS5441675A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5689166A (en) * 1979-12-20 1981-07-20 Fujitsu Ltd Office automation device
JPS5689868A (en) * 1979-12-20 1981-07-21 Fujitsu Ltd Rotary coating equipment
JPS5759438U (en) * 1980-09-26 1982-04-08
JPS59108598U (en) * 1983-01-10 1984-07-21 シャープ株式会社 clothes dryer
JPS61169863A (en) * 1985-01-22 1986-07-31 Nippon Valqua Ind Ltd Production of fixing roll
JPS6262868U (en) * 1985-10-07 1987-04-18
JPS63173327A (en) * 1987-01-13 1988-07-16 Nec Corp Production equipment for semiconductor device
JPS63260027A (en) * 1987-04-16 1988-10-27 Mitsubishi Electric Corp Semiconductor manufacturing equipment
WO2001001203A1 (en) 1999-06-29 2001-01-04 Seiko Instruments Inc. Mechanical timepiece with timed annular balance rotating angle control mechanism

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5689166A (en) * 1979-12-20 1981-07-20 Fujitsu Ltd Office automation device
JPS5689868A (en) * 1979-12-20 1981-07-21 Fujitsu Ltd Rotary coating equipment
JPS5759438U (en) * 1980-09-26 1982-04-08
JPS59108598U (en) * 1983-01-10 1984-07-21 シャープ株式会社 clothes dryer
JPS62636Y2 (en) * 1983-01-10 1987-01-08
JPS61169863A (en) * 1985-01-22 1986-07-31 Nippon Valqua Ind Ltd Production of fixing roll
JPS6262868U (en) * 1985-10-07 1987-04-18
JPH0444216Y2 (en) * 1985-10-07 1992-10-19
JPS63173327A (en) * 1987-01-13 1988-07-16 Nec Corp Production equipment for semiconductor device
JPS63260027A (en) * 1987-04-16 1988-10-27 Mitsubishi Electric Corp Semiconductor manufacturing equipment
JPH0748467B2 (en) * 1987-04-16 1995-05-24 三菱電機株式会社 Semiconductor manufacturing equipment
WO2001001203A1 (en) 1999-06-29 2001-01-04 Seiko Instruments Inc. Mechanical timepiece with timed annular balance rotating angle control mechanism

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