JPS5258458A - Spinner cleaning and drying mechanism - Google Patents
Spinner cleaning and drying mechanismInfo
- Publication number
- JPS5258458A JPS5258458A JP13409875A JP13409875A JPS5258458A JP S5258458 A JPS5258458 A JP S5258458A JP 13409875 A JP13409875 A JP 13409875A JP 13409875 A JP13409875 A JP 13409875A JP S5258458 A JPS5258458 A JP S5258458A
- Authority
- JP
- Japan
- Prior art keywords
- drying mechanism
- spinner cleaning
- drying
- washing
- rear surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: Washing and drying are perfectly performed by washing both front and rear surfaces of a semoconductor wafer, providing jaws on the lateral faces of edges and drying their front and rear surfaces.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13409875A JPS5258458A (en) | 1975-11-10 | 1975-11-10 | Spinner cleaning and drying mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13409875A JPS5258458A (en) | 1975-11-10 | 1975-11-10 | Spinner cleaning and drying mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5258458A true JPS5258458A (en) | 1977-05-13 |
Family
ID=15120383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13409875A Pending JPS5258458A (en) | 1975-11-10 | 1975-11-10 | Spinner cleaning and drying mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258458A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5551276A (en) * | 1978-10-12 | 1980-04-14 | Fuji Denki Setsukei Consulting | Dehydrator for umbrella |
JPS6260028U (en) * | 1985-09-18 | 1987-04-14 | ||
JPS6260027U (en) * | 1985-09-04 | 1987-04-14 | ||
JPS62127743U (en) * | 1986-02-04 | 1987-08-13 | ||
JPS63178531A (en) * | 1987-01-20 | 1988-07-22 | Fujitsu Ltd | Washing type intermediate stage |
JPH01216542A (en) * | 1988-02-25 | 1989-08-30 | Shimada Phys & Chem Ind Co Ltd | Gripper opening/closing device for both-side cleaning apparatus |
-
1975
- 1975-11-10 JP JP13409875A patent/JPS5258458A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5551276A (en) * | 1978-10-12 | 1980-04-14 | Fuji Denki Setsukei Consulting | Dehydrator for umbrella |
JPS6260027U (en) * | 1985-09-04 | 1987-04-14 | ||
JPS6260028U (en) * | 1985-09-18 | 1987-04-14 | ||
JPH0528760Y2 (en) * | 1985-09-18 | 1993-07-23 | ||
JPS62127743U (en) * | 1986-02-04 | 1987-08-13 | ||
JPS63178531A (en) * | 1987-01-20 | 1988-07-22 | Fujitsu Ltd | Washing type intermediate stage |
JPH01216542A (en) * | 1988-02-25 | 1989-08-30 | Shimada Phys & Chem Ind Co Ltd | Gripper opening/closing device for both-side cleaning apparatus |
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