JPS5488070A - Multi-layer liquid-phase growth unit - Google Patents
Multi-layer liquid-phase growth unitInfo
- Publication number
- JPS5488070A JPS5488070A JP15677277A JP15677277A JPS5488070A JP S5488070 A JPS5488070 A JP S5488070A JP 15677277 A JP15677277 A JP 15677277A JP 15677277 A JP15677277 A JP 15677277A JP S5488070 A JPS5488070 A JP S5488070A
- Authority
- JP
- Japan
- Prior art keywords
- melting liquid
- substrates
- concave
- stored
- sinks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To process plural substrates at a time by arranging the slidable second part, which is provided with plural melting liquid sinks, on the first part, which has a concave storing the first substrate, and arragning the third part, which has plural melting liquid sinks, on the second part through a spacer where the second and the third substrates are stored back to back with each other in a concave.
CONSTITUTION: The first substrate 1 which will be grown is stored in a concave which is provided at one end of the surface of the first part 10, and slidable first part 20 having melting liquid sinks 21 to 24 is arranged on all the surface. Next, spacer 40 which has a through hole is put on one end of the upper face of the first part 20, and the second and the third substrates which will be grown are stored and held back to back with each other in this through hole and have respective surfaces exposed. Further, the third part 30 having melting liquid sinks 31 to 34 is arranged on all the surface similarly, and prescribed melting liquid is put in these melting liquid sinks. After that, a temperature is raised to slide the second and the third parts and wet substrates 1 to 3 with melting liquid, and a temperature is reduced to form grown layer at a time.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677277A JPS5488070A (en) | 1977-12-26 | 1977-12-26 | Multi-layer liquid-phase growth unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677277A JPS5488070A (en) | 1977-12-26 | 1977-12-26 | Multi-layer liquid-phase growth unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5488070A true JPS5488070A (en) | 1979-07-12 |
Family
ID=15634969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15677277A Pending JPS5488070A (en) | 1977-12-26 | 1977-12-26 | Multi-layer liquid-phase growth unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5488070A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4976476A (en) * | 1972-11-24 | 1974-07-23 | ||
| JPS5025174A (en) * | 1973-06-19 | 1975-03-17 |
-
1977
- 1977-12-26 JP JP15677277A patent/JPS5488070A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4976476A (en) * | 1972-11-24 | 1974-07-23 | ||
| JPS5025174A (en) * | 1973-06-19 | 1975-03-17 |
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