JPS5478094A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5478094A JPS5478094A JP14688277A JP14688277A JPS5478094A JP S5478094 A JPS5478094 A JP S5478094A JP 14688277 A JP14688277 A JP 14688277A JP 14688277 A JP14688277 A JP 14688277A JP S5478094 A JPS5478094 A JP S5478094A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal
- element body
- photo resist
- entire surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Hall/Mr Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14688277A JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14688277A JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5478094A true JPS5478094A (en) | 1979-06-21 |
| JPS6143876B2 JPS6143876B2 (enrdf_load_stackoverflow) | 1986-09-30 |
Family
ID=15417697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14688277A Granted JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5478094A (enrdf_load_stackoverflow) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4922878A (enrdf_load_stackoverflow) * | 1972-06-21 | 1974-02-28 | ||
| JPS4934784A (enrdf_load_stackoverflow) * | 1972-08-01 | 1974-03-30 | ||
| JPS5110778A (en) * | 1974-07-17 | 1976-01-28 | Naito Densei Kogyo Co Ltd | Jidenhenkansoshi oyobi sonoseizoho |
-
1977
- 1977-12-02 JP JP14688277A patent/JPS5478094A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4922878A (enrdf_load_stackoverflow) * | 1972-06-21 | 1974-02-28 | ||
| JPS4934784A (enrdf_load_stackoverflow) * | 1972-08-01 | 1974-03-30 | ||
| JPS5110778A (en) * | 1974-07-17 | 1976-01-28 | Naito Densei Kogyo Co Ltd | Jidenhenkansoshi oyobi sonoseizoho |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6143876B2 (enrdf_load_stackoverflow) | 1986-09-30 |
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