JPS5477073A - High temperature metal ion source device - Google Patents

High temperature metal ion source device

Info

Publication number
JPS5477073A
JPS5477073A JP14468377A JP14468377A JPS5477073A JP S5477073 A JPS5477073 A JP S5477073A JP 14468377 A JP14468377 A JP 14468377A JP 14468377 A JP14468377 A JP 14468377A JP S5477073 A JPS5477073 A JP S5477073A
Authority
JP
Japan
Prior art keywords
melting point
point metal
pressure vapor
high pressure
high melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14468377A
Other languages
English (en)
Other versions
JPS5812699B2 (ja
Inventor
Osamu Tabata
Kiyotoshi Kuri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OSAKA KOUON DENKI KK
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
OSAKA KOUON DENKI KK
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OSAKA KOUON DENKI KK, Agency of Industrial Science and Technology filed Critical OSAKA KOUON DENKI KK
Priority to JP14468377A priority Critical patent/JPS5812699B2/ja
Publication of JPS5477073A publication Critical patent/JPS5477073A/ja
Publication of JPS5812699B2 publication Critical patent/JPS5812699B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14468377A 1977-12-01 1977-12-01 高温金属イオン源装置 Expired JPS5812699B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14468377A JPS5812699B2 (ja) 1977-12-01 1977-12-01 高温金属イオン源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14468377A JPS5812699B2 (ja) 1977-12-01 1977-12-01 高温金属イオン源装置

Publications (2)

Publication Number Publication Date
JPS5477073A true JPS5477073A (en) 1979-06-20
JPS5812699B2 JPS5812699B2 (ja) 1983-03-09

Family

ID=15367820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14468377A Expired JPS5812699B2 (ja) 1977-12-01 1977-12-01 高温金属イオン源装置

Country Status (1)

Country Link
JP (1) JPS5812699B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581952A (ja) * 1981-06-02 1983-01-07 イオン　ビーム　システムズ　リミテッド イオン源の金属蒸気供給装置
JPS58128646A (ja) * 1982-01-22 1983-08-01 ソシエテ・アノニム・カメカ 熱分解した黒鉛材を有する電子光学装置
JPH0224942A (ja) * 1988-07-14 1990-01-26 Teru Barian Kk イオン注入装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581952A (ja) * 1981-06-02 1983-01-07 イオン　ビーム　システムズ　リミテッド イオン源の金属蒸気供給装置
JPS58128646A (ja) * 1982-01-22 1983-08-01 ソシエテ・アノニム・カメカ 熱分解した黒鉛材を有する電子光学装置
JPH0224942A (ja) * 1988-07-14 1990-01-26 Teru Barian Kk イオン注入装置

Also Published As

Publication number Publication date
JPS5812699B2 (ja) 1983-03-09

Similar Documents

Publication Publication Date Title
JPS5477073A (en) High temperature metal ion source device
GB1101293A (en) High output duoplasmatron-type ion source
JPS56139673A (en) Manufacture of lead coat
US3631283A (en) Device for producing high intensity ion beams
JPS524772A (en) Field-emission electron gun
JPS55141562A (en) Metallizing method
JPS5252099A (en) Plasma ion source
RU735115C (ru) Дуоплазматрон
SU696556A2 (ru) Источник ионов
JPS5222471A (en) Field radiation type electron gun
US2882411A (en) Ion producing mechanism
JPS5668932A (en) Manufacture of magnetic recording medium
JPS5490631A (en) Light oil evaporator
JPS6086273A (ja) イオン源装置
JPS56156644A (en) High frequency electron tube
JPS57208127A (en) Manufacture of semiconductor
JPS5489196A (en) Ion source device
JPS5439566A (en) Electronic microscope
JPS5313869A (en) Cathode ray tube
JPS54127272A (en) Hot-cathode electron source unit
JPS5350661A (en) Microwave tube unit for large power
SU803737A1 (ru) Источник ионов
JPS56132757A (en) Ion source for mass spectrometer
JPS5251861A (en) Field radiation type electronic gun
JPS51141998A (en) Multiple coaxial micro wave ion source