JPS5471988A - Method of developing electron ray resist - Google Patents
Method of developing electron ray resistInfo
- Publication number
- JPS5471988A JPS5471988A JP13907077A JP13907077A JPS5471988A JP S5471988 A JPS5471988 A JP S5471988A JP 13907077 A JP13907077 A JP 13907077A JP 13907077 A JP13907077 A JP 13907077A JP S5471988 A JPS5471988 A JP S5471988A
- Authority
- JP
- Japan
- Prior art keywords
- electron ray
- ray resist
- developing electron
- developing
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Drying Of Semiconductors (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13907077A JPS59128B2 (en) | 1977-11-18 | 1977-11-18 | Electron beam resist development method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13907077A JPS59128B2 (en) | 1977-11-18 | 1977-11-18 | Electron beam resist development method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5471988A true JPS5471988A (en) | 1979-06-08 |
JPS59128B2 JPS59128B2 (en) | 1984-01-05 |
Family
ID=15236782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13907077A Expired JPS59128B2 (en) | 1977-11-18 | 1977-11-18 | Electron beam resist development method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59128B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5746241A (en) * | 1980-09-04 | 1982-03-16 | Mitsubishi Electric Corp | Reversal dry developing method |
JPS57157241A (en) * | 1981-03-25 | 1982-09-28 | Oki Electric Ind Co Ltd | Formation of resist material and its pattern |
-
1977
- 1977-11-18 JP JP13907077A patent/JPS59128B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5746241A (en) * | 1980-09-04 | 1982-03-16 | Mitsubishi Electric Corp | Reversal dry developing method |
JPH0432379B2 (en) * | 1980-09-04 | 1992-05-29 | ||
JPS57157241A (en) * | 1981-03-25 | 1982-09-28 | Oki Electric Ind Co Ltd | Formation of resist material and its pattern |
JPH033213B2 (en) * | 1981-03-25 | 1991-01-18 | Oki Electric Ind Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS59128B2 (en) | 1984-01-05 |
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