JPS5471988A - Method of developing electron ray resist - Google Patents

Method of developing electron ray resist

Info

Publication number
JPS5471988A
JPS5471988A JP13907077A JP13907077A JPS5471988A JP S5471988 A JPS5471988 A JP S5471988A JP 13907077 A JP13907077 A JP 13907077A JP 13907077 A JP13907077 A JP 13907077A JP S5471988 A JPS5471988 A JP S5471988A
Authority
JP
Japan
Prior art keywords
electron ray
ray resist
developing electron
developing
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13907077A
Other languages
Japanese (ja)
Other versions
JPS59128B2 (en
Inventor
Hiroyasu Toyoda
Hiroyoshi Komiya
Hideaki Itakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP13907077A priority Critical patent/JPS59128B2/en
Publication of JPS5471988A publication Critical patent/JPS5471988A/en
Publication of JPS59128B2 publication Critical patent/JPS59128B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Drying Of Semiconductors (AREA)
  • Electron Beam Exposure (AREA)
JP13907077A 1977-11-18 1977-11-18 Electron beam resist development method Expired JPS59128B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13907077A JPS59128B2 (en) 1977-11-18 1977-11-18 Electron beam resist development method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13907077A JPS59128B2 (en) 1977-11-18 1977-11-18 Electron beam resist development method

Publications (2)

Publication Number Publication Date
JPS5471988A true JPS5471988A (en) 1979-06-08
JPS59128B2 JPS59128B2 (en) 1984-01-05

Family

ID=15236782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13907077A Expired JPS59128B2 (en) 1977-11-18 1977-11-18 Electron beam resist development method

Country Status (1)

Country Link
JP (1) JPS59128B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746241A (en) * 1980-09-04 1982-03-16 Mitsubishi Electric Corp Reversal dry developing method
JPS57157241A (en) * 1981-03-25 1982-09-28 Oki Electric Ind Co Ltd Formation of resist material and its pattern

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746241A (en) * 1980-09-04 1982-03-16 Mitsubishi Electric Corp Reversal dry developing method
JPH0432379B2 (en) * 1980-09-04 1992-05-29
JPS57157241A (en) * 1981-03-25 1982-09-28 Oki Electric Ind Co Ltd Formation of resist material and its pattern
JPH033213B2 (en) * 1981-03-25 1991-01-18 Oki Electric Ind Co Ltd

Also Published As

Publication number Publication date
JPS59128B2 (en) 1984-01-05

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