JPS5436188A - Method of exposing electron beam - Google Patents

Method of exposing electron beam

Info

Publication number
JPS5436188A
JPS5436188A JP10239177A JP10239177A JPS5436188A JP S5436188 A JPS5436188 A JP S5436188A JP 10239177 A JP10239177 A JP 10239177A JP 10239177 A JP10239177 A JP 10239177A JP S5436188 A JPS5436188 A JP S5436188A
Authority
JP
Japan
Prior art keywords
electron beam
exposing electron
exposing
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10239177A
Other languages
Japanese (ja)
Inventor
Kiyokatsu Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP10239177A priority Critical patent/JPS5436188A/en
Publication of JPS5436188A publication Critical patent/JPS5436188A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10239177A 1977-08-26 1977-08-26 Method of exposing electron beam Pending JPS5436188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10239177A JPS5436188A (en) 1977-08-26 1977-08-26 Method of exposing electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10239177A JPS5436188A (en) 1977-08-26 1977-08-26 Method of exposing electron beam

Publications (1)

Publication Number Publication Date
JPS5436188A true JPS5436188A (en) 1979-03-16

Family

ID=14326139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10239177A Pending JPS5436188A (en) 1977-08-26 1977-08-26 Method of exposing electron beam

Country Status (1)

Country Link
JP (1) JPS5436188A (en)

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