JPS5436187A - Method of forming matching marks for exposing electron beam - Google Patents

Method of forming matching marks for exposing electron beam

Info

Publication number
JPS5436187A
JPS5436187A JP10239277A JP10239277A JPS5436187A JP S5436187 A JPS5436187 A JP S5436187A JP 10239277 A JP10239277 A JP 10239277A JP 10239277 A JP10239277 A JP 10239277A JP S5436187 A JPS5436187 A JP S5436187A
Authority
JP
Japan
Prior art keywords
electron beam
matching marks
forming matching
exposing electron
exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10239277A
Other languages
Japanese (ja)
Other versions
JPS5439710B2 (en
Inventor
Kiyokatsu Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP10239277A priority Critical patent/JPS5436187A/en
Publication of JPS5436187A publication Critical patent/JPS5436187A/en
Publication of JPS5439710B2 publication Critical patent/JPS5439710B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10239277A 1977-08-26 1977-08-26 Method of forming matching marks for exposing electron beam Granted JPS5436187A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10239277A JPS5436187A (en) 1977-08-26 1977-08-26 Method of forming matching marks for exposing electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10239277A JPS5436187A (en) 1977-08-26 1977-08-26 Method of forming matching marks for exposing electron beam

Publications (2)

Publication Number Publication Date
JPS5436187A true JPS5436187A (en) 1979-03-16
JPS5439710B2 JPS5439710B2 (en) 1979-11-29

Family

ID=14326165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10239277A Granted JPS5436187A (en) 1977-08-26 1977-08-26 Method of forming matching marks for exposing electron beam

Country Status (1)

Country Link
JP (1) JPS5436187A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010886U (en) * 1983-07-01 1985-01-25 三菱電機株式会社 Compressor oil supply system

Also Published As

Publication number Publication date
JPS5439710B2 (en) 1979-11-29

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