JPS5472680A - Method of developing electron ray resist - Google Patents

Method of developing electron ray resist

Info

Publication number
JPS5472680A
JPS5472680A JP14034077A JP14034077A JPS5472680A JP S5472680 A JPS5472680 A JP S5472680A JP 14034077 A JP14034077 A JP 14034077A JP 14034077 A JP14034077 A JP 14034077A JP S5472680 A JPS5472680 A JP S5472680A
Authority
JP
Japan
Prior art keywords
electron ray
ray resist
developing electron
developing
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14034077A
Other languages
Japanese (ja)
Other versions
JPS59129B2 (en
Inventor
Hiroyasu Toyoda
Hiroyoshi Komiya
Hideaki Itakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP14034077A priority Critical patent/JPS59129B2/en
Publication of JPS5472680A publication Critical patent/JPS5472680A/en
Publication of JPS59129B2 publication Critical patent/JPS59129B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Electron Beam Exposure (AREA)
JP14034077A 1977-11-22 1977-11-22 Electron beam resist development method Expired JPS59129B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14034077A JPS59129B2 (en) 1977-11-22 1977-11-22 Electron beam resist development method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14034077A JPS59129B2 (en) 1977-11-22 1977-11-22 Electron beam resist development method

Publications (2)

Publication Number Publication Date
JPS5472680A true JPS5472680A (en) 1979-06-11
JPS59129B2 JPS59129B2 (en) 1984-01-05

Family

ID=15266545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14034077A Expired JPS59129B2 (en) 1977-11-22 1977-11-22 Electron beam resist development method

Country Status (1)

Country Link
JP (1) JPS59129B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157241A (en) * 1981-03-25 1982-09-28 Oki Electric Ind Co Ltd Formation of resist material and its pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157241A (en) * 1981-03-25 1982-09-28 Oki Electric Ind Co Ltd Formation of resist material and its pattern
JPH033213B2 (en) * 1981-03-25 1991-01-18 Oki Electric Ind Co Ltd

Also Published As

Publication number Publication date
JPS59129B2 (en) 1984-01-05

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