JPS5468174A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5468174A JPS5468174A JP13553577A JP13553577A JPS5468174A JP S5468174 A JPS5468174 A JP S5468174A JP 13553577 A JP13553577 A JP 13553577A JP 13553577 A JP13553577 A JP 13553577A JP S5468174 A JPS5468174 A JP S5468174A
- Authority
- JP
- Japan
- Prior art keywords
- rear side
- forming
- low resistance
- crystal substrate
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To enable to establish the semiconductor of good yield rate and high reliability, by processing the rear side with thinner size, after forming the active region of the semiconductor device through the use of the comparatively thick semiconductor substrate.
CONSTITUTION: The base region 10 of transistor, emitter region 11, base electrode 14, and emitter electrode 13 and silicon oxide film 12 are formed on the surface of the silcon signal crystal substrate 9. Next, the rear side of the silicon signal crystal substrate 9 is removed by remaining a given thickness. After that, to improve the ohmic contact at the rear side. the impurity of the same conduction type is doped at the rear side by using ion injection method, forming the low resistance rate layer 15 with heat treatment of a low temperature. Further, the metallic film 16 is formed on the low resistance layer 15.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13553577A JPS6040711B2 (en) | 1977-11-10 | 1977-11-10 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13553577A JPS6040711B2 (en) | 1977-11-10 | 1977-11-10 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5468174A true JPS5468174A (en) | 1979-06-01 |
JPS6040711B2 JPS6040711B2 (en) | 1985-09-12 |
Family
ID=15154038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13553577A Expired JPS6040711B2 (en) | 1977-11-10 | 1977-11-10 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6040711B2 (en) |
-
1977
- 1977-11-10 JP JP13553577A patent/JPS6040711B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6040711B2 (en) | 1985-09-12 |
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