JPS5465599A - Gas sensor - Google Patents
Gas sensorInfo
- Publication number
- JPS5465599A JPS5465599A JP13193177A JP13193177A JPS5465599A JP S5465599 A JPS5465599 A JP S5465599A JP 13193177 A JP13193177 A JP 13193177A JP 13193177 A JP13193177 A JP 13193177A JP S5465599 A JPS5465599 A JP S5465599A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- gas sensor
- insulation
- oxide semiconductor
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enhance reliability and reduce size and cost by laminating wirings for heater and oxide semiconductor film via insulation film on one surface of an insulation substrate.
CONSTITUTION: Wirings 4 for heater are formed by material such as Ti-Pt on an insulation substrate 1 such as ceramics. An insulation film 5 is formed thereon by SiO2 through, e.g., CVD process. Thereafter window-opening for drawing-out of heater electrodes is performed and an oxide semiconductor film 2 such as of SnO2 and its electrodes 3 are formed.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13193177A JPS5465599A (en) | 1977-11-02 | 1977-11-02 | Gas sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13193177A JPS5465599A (en) | 1977-11-02 | 1977-11-02 | Gas sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5465599A true JPS5465599A (en) | 1979-05-26 |
Family
ID=15069548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13193177A Pending JPS5465599A (en) | 1977-11-02 | 1977-11-02 | Gas sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5465599A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57178147A (en) * | 1981-04-27 | 1982-11-02 | Nippon Soken Inc | Detector for gaseous component |
JPH02291951A (en) * | 1989-05-01 | 1990-12-03 | Figaro Eng Inc | Manufacture of gas sensor |
-
1977
- 1977-11-02 JP JP13193177A patent/JPS5465599A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57178147A (en) * | 1981-04-27 | 1982-11-02 | Nippon Soken Inc | Detector for gaseous component |
JPH02291951A (en) * | 1989-05-01 | 1990-12-03 | Figaro Eng Inc | Manufacture of gas sensor |
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