JPS54591A - Element isolating method - Google Patents

Element isolating method

Info

Publication number
JPS54591A
JPS54591A JP6482477A JP6482477A JPS54591A JP S54591 A JPS54591 A JP S54591A JP 6482477 A JP6482477 A JP 6482477A JP 6482477 A JP6482477 A JP 6482477A JP S54591 A JPS54591 A JP S54591A
Authority
JP
Japan
Prior art keywords
element isolating
isolating method
burying
sio
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6482477A
Other languages
Japanese (ja)
Inventor
Masahiko Kogirima
Hiroji Saida
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6482477A priority Critical patent/JPS54591A/en
Publication of JPS54591A publication Critical patent/JPS54591A/en
Pending legal-status Critical Current

Links

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  • Element Separation (AREA)

Abstract

PURPOSE: To obtain isolating regions of good flatness by providing holes of a depth sufficient for interelement isolation within a semiconductor substrate from the substrate surface and burying here with SiO2, Si3N4, Al2O3 or other by using a laser beam or ion beam vapor deposition or a plasma chemical transport method.
COPYRIGHT: (C)1979,JPO&Japio
JP6482477A 1977-06-03 1977-06-03 Element isolating method Pending JPS54591A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6482477A JPS54591A (en) 1977-06-03 1977-06-03 Element isolating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6482477A JPS54591A (en) 1977-06-03 1977-06-03 Element isolating method

Publications (1)

Publication Number Publication Date
JPS54591A true JPS54591A (en) 1979-01-05

Family

ID=13269377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6482477A Pending JPS54591A (en) 1977-06-03 1977-06-03 Element isolating method

Country Status (1)

Country Link
JP (1) JPS54591A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57176742A (en) * 1981-04-21 1982-10-30 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof
JPS57202755A (en) * 1982-04-12 1982-12-11 Toshiba Corp Manufacture of semiconductor device
JPS58202546A (en) * 1982-05-21 1983-11-25 Mitsubishi Electric Corp Formation of element isolation film
JPS59117234A (en) * 1982-12-24 1984-07-06 Mitsubishi Electric Corp Formation of isolation film between elements

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57176742A (en) * 1981-04-21 1982-10-30 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof
JPS6322463B2 (en) * 1981-04-21 1988-05-12 Nippon Telegraph & Telephone
JPS57202755A (en) * 1982-04-12 1982-12-11 Toshiba Corp Manufacture of semiconductor device
JPS58202546A (en) * 1982-05-21 1983-11-25 Mitsubishi Electric Corp Formation of element isolation film
JPS59117234A (en) * 1982-12-24 1984-07-06 Mitsubishi Electric Corp Formation of isolation film between elements

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