JPS5458365A - Mask aligner - Google Patents
Mask alignerInfo
- Publication number
- JPS5458365A JPS5458365A JP12452477A JP12452477A JPS5458365A JP S5458365 A JPS5458365 A JP S5458365A JP 12452477 A JP12452477 A JP 12452477A JP 12452477 A JP12452477 A JP 12452477A JP S5458365 A JPS5458365 A JP S5458365A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mask
- chuck
- plate
- contacted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12452477A JPS5458365A (en) | 1977-10-19 | 1977-10-19 | Mask aligner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12452477A JPS5458365A (en) | 1977-10-19 | 1977-10-19 | Mask aligner |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59005562A Division JPS6057623A (ja) | 1984-01-18 | 1984-01-18 | 非接触シ−ル装置 |
JP59005561A Division JPS59155130A (ja) | 1984-01-18 | 1984-01-18 | マスクアライナ |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5458365A true JPS5458365A (en) | 1979-05-11 |
Family
ID=14887609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12452477A Pending JPS5458365A (en) | 1977-10-19 | 1977-10-19 | Mask aligner |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5458365A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57109330A (en) * | 1980-12-26 | 1982-07-07 | Hitachi Ltd | Mask aliner |
US5529626A (en) * | 1994-10-24 | 1996-06-25 | Nec Electronics, Inc. | Spincup with a wafer backside deposition reduction apparatus |
US5536559A (en) * | 1994-11-22 | 1996-07-16 | Wisconsin Alumni Research Foundation | Stress-free mount for imaging mask |
US6744054B2 (en) | 2000-12-08 | 2004-06-01 | Hitachi, Ltd. | Evacuation use sample chamber and circuit pattern forming apparatus using the same |
CN103309178A (zh) * | 2013-07-04 | 2013-09-18 | 扬州杰利半导体有限公司 | 一种用于半导体晶片的双面对线曝光装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5177072A (ja) * | 1974-12-27 | 1976-07-03 | Fujitsu Ltd | Handotaikibannoshashinshorihoho oyobisochi |
JPS5240072A (en) * | 1975-09-26 | 1977-03-28 | Hitachi Ltd | Atmosphere gas substitution method at exposure of photoresist |
-
1977
- 1977-10-19 JP JP12452477A patent/JPS5458365A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5177072A (ja) * | 1974-12-27 | 1976-07-03 | Fujitsu Ltd | Handotaikibannoshashinshorihoho oyobisochi |
JPS5240072A (en) * | 1975-09-26 | 1977-03-28 | Hitachi Ltd | Atmosphere gas substitution method at exposure of photoresist |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57109330A (en) * | 1980-12-26 | 1982-07-07 | Hitachi Ltd | Mask aliner |
US5529626A (en) * | 1994-10-24 | 1996-06-25 | Nec Electronics, Inc. | Spincup with a wafer backside deposition reduction apparatus |
US5536559A (en) * | 1994-11-22 | 1996-07-16 | Wisconsin Alumni Research Foundation | Stress-free mount for imaging mask |
US5675403A (en) * | 1994-11-22 | 1997-10-07 | Wisconsin Alumni Research Foundation | Stress-free mount for imaging mask |
US6744054B2 (en) | 2000-12-08 | 2004-06-01 | Hitachi, Ltd. | Evacuation use sample chamber and circuit pattern forming apparatus using the same |
CN103309178A (zh) * | 2013-07-04 | 2013-09-18 | 扬州杰利半导体有限公司 | 一种用于半导体晶片的双面对线曝光装置 |
CN103309178B (zh) * | 2013-07-04 | 2015-08-26 | 扬州杰利半导体有限公司 | 一种用于半导体晶片的双面对线曝光装置 |
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