JPS545666A - Electron beam exposure device - Google Patents
Electron beam exposure deviceInfo
- Publication number
- JPS545666A JPS545666A JP7086377A JP7086377A JPS545666A JP S545666 A JPS545666 A JP S545666A JP 7086377 A JP7086377 A JP 7086377A JP 7086377 A JP7086377 A JP 7086377A JP S545666 A JPS545666 A JP S545666A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure device
- beam exposure
- lens
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To increase the exposure performance by making the electron current pass through the first focus of the lens and form the image at the second slit located at the position which passes through the second focus and then setting the distance between the first slit and the lens longer than the distance between the lens and the second slit.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52070863A JPS603774B2 (en) | 1977-06-15 | 1977-06-15 | Electron beam exposure equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52070863A JPS603774B2 (en) | 1977-06-15 | 1977-06-15 | Electron beam exposure equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS545666A true JPS545666A (en) | 1979-01-17 |
JPS603774B2 JPS603774B2 (en) | 1985-01-30 |
Family
ID=13443814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52070863A Expired JPS603774B2 (en) | 1977-06-15 | 1977-06-15 | Electron beam exposure equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS603774B2 (en) |
-
1977
- 1977-06-15 JP JP52070863A patent/JPS603774B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS603774B2 (en) | 1985-01-30 |
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