JPS5454584A - Production of insb mis structure and device - Google Patents

Production of insb mis structure and device

Info

Publication number
JPS5454584A
JPS5454584A JP12094077A JP12094077A JPS5454584A JP S5454584 A JPS5454584 A JP S5454584A JP 12094077 A JP12094077 A JP 12094077A JP 12094077 A JP12094077 A JP 12094077A JP S5454584 A JPS5454584 A JP S5454584A
Authority
JP
Japan
Prior art keywords
film
insb
sio
entire surface
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12094077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138625B2 (enExample
Inventor
Nobuo Kodera
Yukiyoshi Harada
Takashi Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12094077A priority Critical patent/JPS5454584A/ja
Publication of JPS5454584A publication Critical patent/JPS5454584A/ja
Publication of JPS6138625B2 publication Critical patent/JPS6138625B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Drying Of Semiconductors (AREA)
JP12094077A 1977-10-11 1977-10-11 Production of insb mis structure and device Granted JPS5454584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12094077A JPS5454584A (en) 1977-10-11 1977-10-11 Production of insb mis structure and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12094077A JPS5454584A (en) 1977-10-11 1977-10-11 Production of insb mis structure and device

Publications (2)

Publication Number Publication Date
JPS5454584A true JPS5454584A (en) 1979-04-28
JPS6138625B2 JPS6138625B2 (enExample) 1986-08-30

Family

ID=14798722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12094077A Granted JPS5454584A (en) 1977-10-11 1977-10-11 Production of insb mis structure and device

Country Status (1)

Country Link
JP (1) JPS5454584A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629371A (en) * 1979-08-20 1981-03-24 Nippon Telegr & Teleph Corp <Ntt> Manufacture of insulated gate type field effect transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629371A (en) * 1979-08-20 1981-03-24 Nippon Telegr & Teleph Corp <Ntt> Manufacture of insulated gate type field effect transistor

Also Published As

Publication number Publication date
JPS6138625B2 (enExample) 1986-08-30

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