JPS5454567A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5454567A JPS5454567A JP12215477A JP12215477A JPS5454567A JP S5454567 A JPS5454567 A JP S5454567A JP 12215477 A JP12215477 A JP 12215477A JP 12215477 A JP12215477 A JP 12215477A JP S5454567 A JPS5454567 A JP S5454567A
- Authority
- JP
- Japan
- Prior art keywords
- layers
- impurities
- substrates
- same
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To achieve the improvement in volume productivity by mechanically shaping one main surface of substrates diffused with impurities on both surfaces then chemically etching the same and diffusing the impurities.
CONSTITUTION: N+ layers 2 are formed on both surfaces of N type Si substrates 1. One surface thereof is mechanically shaped by placing the same on a rotary base 3 and revolving a cup wheel 4. Following to this, both surfaces are chemically etched about 10μ to remove distortions, after which an oxide film 5 is formed and p layers 6 and N layers 7 are selectively formed. This method increases the number of processing of one side etching and improves volume productivity
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12215477A JPS5454567A (en) | 1977-10-07 | 1977-10-07 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12215477A JPS5454567A (en) | 1977-10-07 | 1977-10-07 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5454567A true JPS5454567A (en) | 1979-04-28 |
Family
ID=14828931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12215477A Pending JPS5454567A (en) | 1977-10-07 | 1977-10-07 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5454567A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57194583A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Mos semiconductor device and manufacture thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169360A (en) * | 1974-12-05 | 1976-06-15 | New Nippon Electric Co | Handotaisoshino seizohoho |
-
1977
- 1977-10-07 JP JP12215477A patent/JPS5454567A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169360A (en) * | 1974-12-05 | 1976-06-15 | New Nippon Electric Co | Handotaisoshino seizohoho |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57194583A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Mos semiconductor device and manufacture thereof |
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