JPS5451372A - Sampler of scanning electron microscope of the like - Google Patents

Sampler of scanning electron microscope of the like

Info

Publication number
JPS5451372A
JPS5451372A JP11673377A JP11673377A JPS5451372A JP S5451372 A JPS5451372 A JP S5451372A JP 11673377 A JP11673377 A JP 11673377A JP 11673377 A JP11673377 A JP 11673377A JP S5451372 A JPS5451372 A JP S5451372A
Authority
JP
Japan
Prior art keywords
sample
cooling
processing chamber
chamber
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11673377A
Other languages
Japanese (ja)
Other versions
JPS5855616B2 (en
Inventor
Akimitsu Okura
Tadao Watabe
Takashi Nagatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11673377A priority Critical patent/JPS5855616B2/en
Publication of JPS5451372A publication Critical patent/JPS5451372A/en
Publication of JPS5855616B2 publication Critical patent/JPS5855616B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve the operation of the sample device of a scanning electron microscope, by composing the device of a sample coolig method, sample temperature controller, sample holder, and sample processing chamber.
CONSTITUTION: Sample processing chamber 2, provided being linked to samle chamber 1, is disconected vacuously by air lock valve 3 and also provided with cooling unit 4 in chamber 2. Unit 4 consists of cooling tank 5, cooling tank support 8, cooling-unit moving table 9, and sample temperature controller 10. Controller 10, on the other hand, consists of heater 12, lead wire 13, sample holder 11, thermocouple 14, lead-in terminal 15, heater power supply 16 and thermocouple meter 17. Between cooling-unit moving table 9 and the flank of the sample processing chamber confronting to it, vacuum-sealing 0 ring 22 is prvided which is easy to slide. Cap 24 is fitted to cooling tank 5 in order to prevent refrigerant 6 from overflowing. Sample 18, after dipped in liquid nitrogen and frozen, is mounted on cooling body 7 together with holder 11
COPYRIGHT: (C)1979,JPO&Japio
JP11673377A 1977-09-30 1977-09-30 Sample equipment such as scanning electron microscopes Expired JPS5855616B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11673377A JPS5855616B2 (en) 1977-09-30 1977-09-30 Sample equipment such as scanning electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11673377A JPS5855616B2 (en) 1977-09-30 1977-09-30 Sample equipment such as scanning electron microscopes

Publications (2)

Publication Number Publication Date
JPS5451372A true JPS5451372A (en) 1979-04-23
JPS5855616B2 JPS5855616B2 (en) 1983-12-10

Family

ID=14694431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11673377A Expired JPS5855616B2 (en) 1977-09-30 1977-09-30 Sample equipment such as scanning electron microscopes

Country Status (1)

Country Link
JP (1) JPS5855616B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58182255U (en) * 1982-05-28 1983-12-05 日本電子株式会社 Sample contamination prevention device
CN103558232A (en) * 2013-10-16 2014-02-05 中国科学院物理研究所 In-situ varying temperature spectral measurement device in transmission electron microscope
KR20150061207A (en) * 2013-11-27 2015-06-04 현대제철 주식회사 Sample holder device having fuction of controlling temperature, sample thermal annealing and surface analyzing apparatus using the same
JP2018129163A (en) * 2017-02-08 2018-08-16 日本電子株式会社 Sample moving device and electron microscope

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58182255U (en) * 1982-05-28 1983-12-05 日本電子株式会社 Sample contamination prevention device
JPS6326924Y2 (en) * 1982-05-28 1988-07-21
CN103558232A (en) * 2013-10-16 2014-02-05 中国科学院物理研究所 In-situ varying temperature spectral measurement device in transmission electron microscope
CN103558232B (en) * 2013-10-16 2015-10-28 中国科学院物理研究所 A kind of device in transmission electron microscope situ alternating temperature measure spectrum
KR20150061207A (en) * 2013-11-27 2015-06-04 현대제철 주식회사 Sample holder device having fuction of controlling temperature, sample thermal annealing and surface analyzing apparatus using the same
JP2018129163A (en) * 2017-02-08 2018-08-16 日本電子株式会社 Sample moving device and electron microscope

Also Published As

Publication number Publication date
JPS5855616B2 (en) 1983-12-10

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