JPS5450441A - Etching method for molybdenum thin film - Google Patents

Etching method for molybdenum thin film

Info

Publication number
JPS5450441A
JPS5450441A JP11662177A JP11662177A JPS5450441A JP S5450441 A JPS5450441 A JP S5450441A JP 11662177 A JP11662177 A JP 11662177A JP 11662177 A JP11662177 A JP 11662177A JP S5450441 A JPS5450441 A JP S5450441A
Authority
JP
Japan
Prior art keywords
thin film
etching method
molybdenum thin
contg
soln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11662177A
Other languages
Japanese (ja)
Inventor
Shunji Kashiwagi
Hideo Oikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP11662177A priority Critical patent/JPS5450441A/en
Publication of JPS5450441A publication Critical patent/JPS5450441A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/38—Alkaline compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)

Abstract

PURPOSE:To make it possible to perform stable etching in spite of long-term storage by using an aq. soln. contg. predetermined amts. of alkali ferricyanide and disodium hydrogenphosphate. CONSTITUTION:A molybdenum thin film is etched using an aq. soln. contg. more than 0.01 mol/l of alkali ferricyanide and more than 0.01 mol/l of disodium hydrogenphosphate. Thus, in case a photoresist is used, it is not deteriorated or peeled off and the thin film is uniformly etched with no side-etching, forming a minute pattern.
JP11662177A 1977-09-30 1977-09-30 Etching method for molybdenum thin film Pending JPS5450441A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11662177A JPS5450441A (en) 1977-09-30 1977-09-30 Etching method for molybdenum thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11662177A JPS5450441A (en) 1977-09-30 1977-09-30 Etching method for molybdenum thin film

Publications (1)

Publication Number Publication Date
JPS5450441A true JPS5450441A (en) 1979-04-20

Family

ID=14691710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11662177A Pending JPS5450441A (en) 1977-09-30 1977-09-30 Etching method for molybdenum thin film

Country Status (1)

Country Link
JP (1) JPS5450441A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05311469A (en) * 1990-04-30 1993-11-22 Internatl Business Mach Corp <Ibm> Effective near neutral ph etching soln. for molybdenum or tungsten
DE19535307A1 (en) * 1995-09-22 1997-03-27 Siemens Ag Etching molybdenum surfaces

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05311469A (en) * 1990-04-30 1993-11-22 Internatl Business Mach Corp <Ibm> Effective near neutral ph etching soln. for molybdenum or tungsten
DE19535307A1 (en) * 1995-09-22 1997-03-27 Siemens Ag Etching molybdenum surfaces

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