JPS5447568A - Deposition method - Google Patents
Deposition methodInfo
- Publication number
- JPS5447568A JPS5447568A JP11337377A JP11337377A JPS5447568A JP S5447568 A JPS5447568 A JP S5447568A JP 11337377 A JP11337377 A JP 11337377A JP 11337377 A JP11337377 A JP 11337377A JP S5447568 A JPS5447568 A JP S5447568A
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- jig
- reaction tube
- plates
- erected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To avert the production of holes in wafers and eliminate the reverse dielectric strength defects of the semiconductor devices using these by heating the semiconductor wafers and impurity sources in an O2 atmosphere of a reduced pressure state of a high degree of vacuum and depositing impurities in wafers.
CONSTITUTION: A multiplicity of Si wafers 2 are erected on a wafer screening jig 1 made of quart and hollow circular support plates 3 are erected on the jig 1, by being positioned at both ends of the wafers 2. Next, an impurity source stage 4 is put on across these support plates 3 and BN plates 5 being impurity sources are place thereon. Next, the jig 1 is inserted into the entrance low temperature area of a quartz reaction tube 6 having been heated by the heating elements 7 provided on the outside, the tube is sealed with a cap 8 and O2 gas is fed into the reaction tube 6 through feed ports 9 thru 10 to be substituted with the N2 gas in the inside. Thereafter, the inside of the reaction tube 6 is reduced down to 0.02 to 0.08torr, thence the jig 1 is moved to the high temperature area in the reaction tube 6 and in this state the B in the BN plates 5 is deposited on the wafers 2
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11337377A JPS5447568A (en) | 1977-09-22 | 1977-09-22 | Deposition method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11337377A JPS5447568A (en) | 1977-09-22 | 1977-09-22 | Deposition method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5447568A true JPS5447568A (en) | 1979-04-14 |
Family
ID=14610634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11337377A Pending JPS5447568A (en) | 1977-09-22 | 1977-09-22 | Deposition method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5447568A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007252911A (en) * | 2006-03-22 | 2007-10-04 | Groz-Beckert Kg | Needle holder for sewing machine |
-
1977
- 1977-09-22 JP JP11337377A patent/JPS5447568A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007252911A (en) * | 2006-03-22 | 2007-10-04 | Groz-Beckert Kg | Needle holder for sewing machine |
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