JPS5444473A - Nanufacture for semiconductor device - Google Patents
Nanufacture for semiconductor deviceInfo
- Publication number
- JPS5444473A JPS5444473A JP11050577A JP11050577A JPS5444473A JP S5444473 A JPS5444473 A JP S5444473A JP 11050577 A JP11050577 A JP 11050577A JP 11050577 A JP11050577 A JP 11050577A JP S5444473 A JPS5444473 A JP S5444473A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- phosphorus
- deposited
- film
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11050577A JPS5444473A (en) | 1977-09-16 | 1977-09-16 | Nanufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11050577A JPS5444473A (en) | 1977-09-16 | 1977-09-16 | Nanufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5444473A true JPS5444473A (en) | 1979-04-07 |
Family
ID=14537463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11050577A Pending JPS5444473A (en) | 1977-09-16 | 1977-09-16 | Nanufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5444473A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5324883A (en) * | 1976-08-19 | 1978-03-08 | Seiko Instr & Electronics Ltd | Vicker's hardness tester |
JP2005350266A (ja) * | 2004-05-14 | 2005-12-22 | Seiko Epson Corp | 給紙装置及び給紙方法 |
CN102420131A (zh) * | 2011-07-01 | 2012-04-18 | 上海华力微电子有限公司 | 集成在前道工艺中的硅片背面氮化硅成长方法 |
-
1977
- 1977-09-16 JP JP11050577A patent/JPS5444473A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5324883A (en) * | 1976-08-19 | 1978-03-08 | Seiko Instr & Electronics Ltd | Vicker's hardness tester |
JPS605894B2 (ja) * | 1976-08-19 | 1985-02-14 | セイコーインスツルメンツ株式会社 | ビツカ−ス硬さ試験機 |
JP2005350266A (ja) * | 2004-05-14 | 2005-12-22 | Seiko Epson Corp | 給紙装置及び給紙方法 |
JP4622661B2 (ja) * | 2004-05-14 | 2011-02-02 | セイコーエプソン株式会社 | 給紙装置及び給紙方法 |
CN102420131A (zh) * | 2011-07-01 | 2012-04-18 | 上海华力微电子有限公司 | 集成在前道工艺中的硅片背面氮化硅成长方法 |
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