JPS5444473A - Nanufacture for semiconductor device - Google Patents

Nanufacture for semiconductor device

Info

Publication number
JPS5444473A
JPS5444473A JP11050577A JP11050577A JPS5444473A JP S5444473 A JPS5444473 A JP S5444473A JP 11050577 A JP11050577 A JP 11050577A JP 11050577 A JP11050577 A JP 11050577A JP S5444473 A JPS5444473 A JP S5444473A
Authority
JP
Japan
Prior art keywords
oxide film
phosphorus
deposited
film
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11050577A
Other languages
English (en)
Inventor
Shigeru Sato
Nozomi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11050577A priority Critical patent/JPS5444473A/ja
Publication of JPS5444473A publication Critical patent/JPS5444473A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP11050577A 1977-09-16 1977-09-16 Nanufacture for semiconductor device Pending JPS5444473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11050577A JPS5444473A (en) 1977-09-16 1977-09-16 Nanufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11050577A JPS5444473A (en) 1977-09-16 1977-09-16 Nanufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5444473A true JPS5444473A (en) 1979-04-07

Family

ID=14537463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11050577A Pending JPS5444473A (en) 1977-09-16 1977-09-16 Nanufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5444473A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324883A (en) * 1976-08-19 1978-03-08 Seiko Instr & Electronics Ltd Vicker's hardness tester
JP2005350266A (ja) * 2004-05-14 2005-12-22 Seiko Epson Corp 給紙装置及び給紙方法
CN102420131A (zh) * 2011-07-01 2012-04-18 上海华力微电子有限公司 集成在前道工艺中的硅片背面氮化硅成长方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324883A (en) * 1976-08-19 1978-03-08 Seiko Instr & Electronics Ltd Vicker's hardness tester
JPS605894B2 (ja) * 1976-08-19 1985-02-14 セイコーインスツルメンツ株式会社 ビツカ−ス硬さ試験機
JP2005350266A (ja) * 2004-05-14 2005-12-22 Seiko Epson Corp 給紙装置及び給紙方法
JP4622661B2 (ja) * 2004-05-14 2011-02-02 セイコーエプソン株式会社 給紙装置及び給紙方法
CN102420131A (zh) * 2011-07-01 2012-04-18 上海华力微电子有限公司 集成在前道工艺中的硅片背面氮化硅成长方法

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