JPS5435791A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPS5435791A JPS5435791A JP10187577A JP10187577A JPS5435791A JP S5435791 A JPS5435791 A JP S5435791A JP 10187577 A JP10187577 A JP 10187577A JP 10187577 A JP10187577 A JP 10187577A JP S5435791 A JPS5435791 A JP S5435791A
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- semiconductor pressure
- diffusionformed
- insulators
- improvement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To achieve the improvement on volume productivity by providing specified wiring layers, insulators and lead-out electrodes which are diffusionformed on one main plane of a silicon substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10187577A JPS5940252B2 (en) | 1977-08-25 | 1977-08-25 | semiconductor pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10187577A JPS5940252B2 (en) | 1977-08-25 | 1977-08-25 | semiconductor pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5435791A true JPS5435791A (en) | 1979-03-16 |
JPS5940252B2 JPS5940252B2 (en) | 1984-09-28 |
Family
ID=14312135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10187577A Expired JPS5940252B2 (en) | 1977-08-25 | 1977-08-25 | semiconductor pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5940252B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57125827A (en) * | 1981-01-29 | 1982-08-05 | Mitsubishi Electric Corp | Semiconductor pressure sensor for car |
JPH03220436A (en) * | 1990-01-25 | 1991-09-27 | Mitsubishi Electric Corp | Detecting apparatus of pressure of semiconductor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8384168B2 (en) * | 2011-04-21 | 2013-02-26 | Freescale Semiconductor, Inc. | Sensor device with sealing structure |
-
1977
- 1977-08-25 JP JP10187577A patent/JPS5940252B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57125827A (en) * | 1981-01-29 | 1982-08-05 | Mitsubishi Electric Corp | Semiconductor pressure sensor for car |
JPH03220436A (en) * | 1990-01-25 | 1991-09-27 | Mitsubishi Electric Corp | Detecting apparatus of pressure of semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS5940252B2 (en) | 1984-09-28 |
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