JPS5435791A - Semiconductor pressure sensor - Google Patents

Semiconductor pressure sensor

Info

Publication number
JPS5435791A
JPS5435791A JP10187577A JP10187577A JPS5435791A JP S5435791 A JPS5435791 A JP S5435791A JP 10187577 A JP10187577 A JP 10187577A JP 10187577 A JP10187577 A JP 10187577A JP S5435791 A JPS5435791 A JP S5435791A
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconductor pressure
diffusionformed
insulators
improvement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10187577A
Other languages
Japanese (ja)
Other versions
JPS5940252B2 (en
Inventor
Tetsuo Fujii
Norio Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP10187577A priority Critical patent/JPS5940252B2/en
Publication of JPS5435791A publication Critical patent/JPS5435791A/en
Publication of JPS5940252B2 publication Critical patent/JPS5940252B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To achieve the improvement on volume productivity by providing specified wiring layers, insulators and lead-out electrodes which are diffusionformed on one main plane of a silicon substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP10187577A 1977-08-25 1977-08-25 semiconductor pressure sensor Expired JPS5940252B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10187577A JPS5940252B2 (en) 1977-08-25 1977-08-25 semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10187577A JPS5940252B2 (en) 1977-08-25 1977-08-25 semiconductor pressure sensor

Publications (2)

Publication Number Publication Date
JPS5435791A true JPS5435791A (en) 1979-03-16
JPS5940252B2 JPS5940252B2 (en) 1984-09-28

Family

ID=14312135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10187577A Expired JPS5940252B2 (en) 1977-08-25 1977-08-25 semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS5940252B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57125827A (en) * 1981-01-29 1982-08-05 Mitsubishi Electric Corp Semiconductor pressure sensor for car
JPH03220436A (en) * 1990-01-25 1991-09-27 Mitsubishi Electric Corp Detecting apparatus of pressure of semiconductor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8384168B2 (en) * 2011-04-21 2013-02-26 Freescale Semiconductor, Inc. Sensor device with sealing structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57125827A (en) * 1981-01-29 1982-08-05 Mitsubishi Electric Corp Semiconductor pressure sensor for car
JPH03220436A (en) * 1990-01-25 1991-09-27 Mitsubishi Electric Corp Detecting apparatus of pressure of semiconductor

Also Published As

Publication number Publication date
JPS5940252B2 (en) 1984-09-28

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