JPS5434770A - Semiconductor substrate and manufacture of semiconductor using it - Google Patents
Semiconductor substrate and manufacture of semiconductor using itInfo
- Publication number
- JPS5434770A JPS5434770A JP10206477A JP10206477A JPS5434770A JP S5434770 A JPS5434770 A JP S5434770A JP 10206477 A JP10206477 A JP 10206477A JP 10206477 A JP10206477 A JP 10206477A JP S5434770 A JPS5434770 A JP S5434770A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- semiconductor substrate
- buried layer
- growth layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To attain accurate positioning by diffusion-forming a high-impurity density buried layer on a semiconductor substrate with at least two display parts displaying a crystal azimuth, by providing a vapor-phase growth layer onto it, and by using the pattern of the growth layer, generated corresponding to the buried layer, as the reference.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10206477A JPS5434770A (en) | 1977-08-24 | 1977-08-24 | Semiconductor substrate and manufacture of semiconductor using it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10206477A JPS5434770A (en) | 1977-08-24 | 1977-08-24 | Semiconductor substrate and manufacture of semiconductor using it |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5434770A true JPS5434770A (en) | 1979-03-14 |
Family
ID=14317326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10206477A Pending JPS5434770A (en) | 1977-08-24 | 1977-08-24 | Semiconductor substrate and manufacture of semiconductor using it |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5434770A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS568817A (en) * | 1979-07-04 | 1981-01-29 | Nec Corp | Manufacture of semiconductor device |
JPS5612745A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Production of semiconductor device |
JPS5785227A (en) * | 1980-11-17 | 1982-05-27 | Toshiba Corp | Manufacture of semiconductor device |
JPH0344056A (en) * | 1989-07-12 | 1991-02-25 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1977
- 1977-08-24 JP JP10206477A patent/JPS5434770A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS568817A (en) * | 1979-07-04 | 1981-01-29 | Nec Corp | Manufacture of semiconductor device |
JPS5612745A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Production of semiconductor device |
JPS6252454B2 (en) * | 1979-07-10 | 1987-11-05 | Nippon Electric Co | |
JPS5785227A (en) * | 1980-11-17 | 1982-05-27 | Toshiba Corp | Manufacture of semiconductor device |
JPH0344056A (en) * | 1989-07-12 | 1991-02-25 | Fujitsu Ltd | Manufacture of semiconductor device |
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