JPS5411764A - Surface condition measuring method of disc substrates - Google Patents
Surface condition measuring method of disc substratesInfo
- Publication number
- JPS5411764A JPS5411764A JP7654177A JP7654177A JPS5411764A JP S5411764 A JPS5411764 A JP S5411764A JP 7654177 A JP7654177 A JP 7654177A JP 7654177 A JP7654177 A JP 7654177A JP S5411764 A JPS5411764 A JP S5411764A
- Authority
- JP
- Japan
- Prior art keywords
- surface condition
- measuring method
- condition measuring
- disc substrates
- undulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
PURPOSE: To readily measure the undulation and surface condition of substrate over its entire surface without giving any damage thereto by providing a head buried with radiating and receiving fibers on the rotating disc substrate at a specified spacing.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7654177A JPS5411764A (en) | 1977-06-29 | 1977-06-29 | Surface condition measuring method of disc substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7654177A JPS5411764A (en) | 1977-06-29 | 1977-06-29 | Surface condition measuring method of disc substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5411764A true JPS5411764A (en) | 1979-01-29 |
Family
ID=13608120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7654177A Pending JPS5411764A (en) | 1977-06-29 | 1977-06-29 | Surface condition measuring method of disc substrates |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5411764A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4353650A (en) * | 1980-06-16 | 1982-10-12 | The United States Of America As Represented By The United States Department Of Energy | Laser heterodyne surface profiler |
JPS5812808U (en) * | 1981-07-16 | 1983-01-27 | 富士電機株式会社 | Irregularity inspection device |
JPH0243329A (en) * | 1988-08-03 | 1990-02-13 | Nippon Steel Corp | Production of stock for producing titanium alloy powder |
JPH05295534A (en) * | 1992-04-22 | 1993-11-09 | Japan Energy Corp | Titanium nitride sputtering target and its production |
JPH0658214B2 (en) * | 1984-10-12 | 1994-08-03 | キヤタピラ− トラクタ− コムパニ− | Optical fiber seam detection device |
JP2008268189A (en) * | 2007-03-28 | 2008-11-06 | Hitachi High-Technologies Corp | Method and apparatus for inspecting surface defect |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS451060Y1 (en) * | 1969-03-06 | 1970-01-19 |
-
1977
- 1977-06-29 JP JP7654177A patent/JPS5411764A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS451060Y1 (en) * | 1969-03-06 | 1970-01-19 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4353650A (en) * | 1980-06-16 | 1982-10-12 | The United States Of America As Represented By The United States Department Of Energy | Laser heterodyne surface profiler |
JPS5812808U (en) * | 1981-07-16 | 1983-01-27 | 富士電機株式会社 | Irregularity inspection device |
JPH0658214B2 (en) * | 1984-10-12 | 1994-08-03 | キヤタピラ− トラクタ− コムパニ− | Optical fiber seam detection device |
JPH0243329A (en) * | 1988-08-03 | 1990-02-13 | Nippon Steel Corp | Production of stock for producing titanium alloy powder |
JPH05295534A (en) * | 1992-04-22 | 1993-11-09 | Japan Energy Corp | Titanium nitride sputtering target and its production |
JP2008268189A (en) * | 2007-03-28 | 2008-11-06 | Hitachi High-Technologies Corp | Method and apparatus for inspecting surface defect |
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