JPS5411764A - Surface condition measuring method of disc substrates - Google Patents

Surface condition measuring method of disc substrates

Info

Publication number
JPS5411764A
JPS5411764A JP7654177A JP7654177A JPS5411764A JP S5411764 A JPS5411764 A JP S5411764A JP 7654177 A JP7654177 A JP 7654177A JP 7654177 A JP7654177 A JP 7654177A JP S5411764 A JPS5411764 A JP S5411764A
Authority
JP
Japan
Prior art keywords
surface condition
measuring method
condition measuring
disc substrates
undulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7654177A
Other languages
Japanese (ja)
Inventor
Shigeru Arai
Toshio Kumai
Nagaaki Etsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7654177A priority Critical patent/JPS5411764A/en
Publication of JPS5411764A publication Critical patent/JPS5411764A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE: To readily measure the undulation and surface condition of substrate over its entire surface without giving any damage thereto by providing a head buried with radiating and receiving fibers on the rotating disc substrate at a specified spacing.
COPYRIGHT: (C)1979,JPO&Japio
JP7654177A 1977-06-29 1977-06-29 Surface condition measuring method of disc substrates Pending JPS5411764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7654177A JPS5411764A (en) 1977-06-29 1977-06-29 Surface condition measuring method of disc substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7654177A JPS5411764A (en) 1977-06-29 1977-06-29 Surface condition measuring method of disc substrates

Publications (1)

Publication Number Publication Date
JPS5411764A true JPS5411764A (en) 1979-01-29

Family

ID=13608120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7654177A Pending JPS5411764A (en) 1977-06-29 1977-06-29 Surface condition measuring method of disc substrates

Country Status (1)

Country Link
JP (1) JPS5411764A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4353650A (en) * 1980-06-16 1982-10-12 The United States Of America As Represented By The United States Department Of Energy Laser heterodyne surface profiler
JPS5812808U (en) * 1981-07-16 1983-01-27 富士電機株式会社 Irregularity inspection device
JPH0243329A (en) * 1988-08-03 1990-02-13 Nippon Steel Corp Production of stock for producing titanium alloy powder
JPH05295534A (en) * 1992-04-22 1993-11-09 Japan Energy Corp Titanium nitride sputtering target and its production
JPH0658214B2 (en) * 1984-10-12 1994-08-03 キヤタピラ− トラクタ− コムパニ− Optical fiber seam detection device
JP2008268189A (en) * 2007-03-28 2008-11-06 Hitachi High-Technologies Corp Method and apparatus for inspecting surface defect

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS451060Y1 (en) * 1969-03-06 1970-01-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS451060Y1 (en) * 1969-03-06 1970-01-19

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4353650A (en) * 1980-06-16 1982-10-12 The United States Of America As Represented By The United States Department Of Energy Laser heterodyne surface profiler
JPS5812808U (en) * 1981-07-16 1983-01-27 富士電機株式会社 Irregularity inspection device
JPH0658214B2 (en) * 1984-10-12 1994-08-03 キヤタピラ− トラクタ− コムパニ− Optical fiber seam detection device
JPH0243329A (en) * 1988-08-03 1990-02-13 Nippon Steel Corp Production of stock for producing titanium alloy powder
JPH05295534A (en) * 1992-04-22 1993-11-09 Japan Energy Corp Titanium nitride sputtering target and its production
JP2008268189A (en) * 2007-03-28 2008-11-06 Hitachi High-Technologies Corp Method and apparatus for inspecting surface defect

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