JPS5431089A - Vacuum metallizer - Google Patents

Vacuum metallizer

Info

Publication number
JPS5431089A
JPS5431089A JP8096877A JP8096877A JPS5431089A JP S5431089 A JPS5431089 A JP S5431089A JP 8096877 A JP8096877 A JP 8096877A JP 8096877 A JP8096877 A JP 8096877A JP S5431089 A JPS5431089 A JP S5431089A
Authority
JP
Japan
Prior art keywords
deposited
vacuum metallizer
quarts
monitor
measures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8096877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5515549B2 (enExample
Inventor
Ikumitsu Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8096877A priority Critical patent/JPS5431089A/ja
Priority to GB7827597A priority patent/GB2000882B/en
Priority to US05/918,272 priority patent/US4207836A/en
Priority to DE2828651A priority patent/DE2828651C2/de
Priority to FR7819740A priority patent/FR2396093A1/fr
Publication of JPS5431089A publication Critical patent/JPS5431089A/ja
Publication of JPS5515549B2 publication Critical patent/JPS5515549B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Physical Vapour Deposition (AREA)
JP8096877A 1977-07-01 1977-07-08 Vacuum metallizer Granted JPS5431089A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP8096877A JPS5431089A (en) 1977-07-08 1977-07-08 Vacuum metallizer
GB7827597A GB2000882B (en) 1977-07-01 1978-06-22 Vacuum vapour-deposition apparatus
US05/918,272 US4207836A (en) 1977-07-01 1978-06-22 Vacuum vapor-deposition apparatus
DE2828651A DE2828651C2 (de) 1977-07-01 1978-06-29 Vakuum-Aufdampfeinrichtung
FR7819740A FR2396093A1 (fr) 1977-07-01 1978-06-30 Appareil pour le depot en phase de vapeurs sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8096877A JPS5431089A (en) 1977-07-08 1977-07-08 Vacuum metallizer

Publications (2)

Publication Number Publication Date
JPS5431089A true JPS5431089A (en) 1979-03-07
JPS5515549B2 JPS5515549B2 (enExample) 1980-04-24

Family

ID=13733303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8096877A Granted JPS5431089A (en) 1977-07-01 1977-07-08 Vacuum metallizer

Country Status (1)

Country Link
JP (1) JPS5431089A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03206910A (ja) * 1990-01-08 1991-09-10 Matsushita Electric Ind Co Ltd 膜厚測定装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101309U (enExample) * 1984-12-10 1986-06-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03206910A (ja) * 1990-01-08 1991-09-10 Matsushita Electric Ind Co Ltd 膜厚測定装置

Also Published As

Publication number Publication date
JPS5515549B2 (enExample) 1980-04-24

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