JPS5431089A - Vacuum metallizer - Google Patents
Vacuum metallizerInfo
- Publication number
- JPS5431089A JPS5431089A JP8096877A JP8096877A JPS5431089A JP S5431089 A JPS5431089 A JP S5431089A JP 8096877 A JP8096877 A JP 8096877A JP 8096877 A JP8096877 A JP 8096877A JP S5431089 A JPS5431089 A JP S5431089A
- Authority
- JP
- Japan
- Prior art keywords
- deposited
- vacuum metallizer
- quarts
- monitor
- measures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8096877A JPS5431089A (en) | 1977-07-08 | 1977-07-08 | Vacuum metallizer |
GB7827597A GB2000882B (en) | 1977-07-01 | 1978-06-22 | Vacuum vapour-deposition apparatus |
US05/918,272 US4207836A (en) | 1977-07-01 | 1978-06-22 | Vacuum vapor-deposition apparatus |
DE2828651A DE2828651C2 (de) | 1977-07-01 | 1978-06-29 | Vakuum-Aufdampfeinrichtung |
FR7819740A FR2396093A1 (fr) | 1977-07-01 | 1978-06-30 | Appareil pour le depot en phase de vapeurs sous vide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8096877A JPS5431089A (en) | 1977-07-08 | 1977-07-08 | Vacuum metallizer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5431089A true JPS5431089A (en) | 1979-03-07 |
JPS5515549B2 JPS5515549B2 (ja) | 1980-04-24 |
Family
ID=13733303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8096877A Granted JPS5431089A (en) | 1977-07-01 | 1977-07-08 | Vacuum metallizer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5431089A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03206910A (ja) * | 1990-01-08 | 1991-09-10 | Matsushita Electric Ind Co Ltd | 膜厚測定装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61101309U (ja) * | 1984-12-10 | 1986-06-28 |
-
1977
- 1977-07-08 JP JP8096877A patent/JPS5431089A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03206910A (ja) * | 1990-01-08 | 1991-09-10 | Matsushita Electric Ind Co Ltd | 膜厚測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5515549B2 (ja) | 1980-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52113379A (en) | Vacuum evaporation | |
JPS51114985A (en) | Mothod to analyse urine, etc. | |
JPS53132213A (en) | Tracking control unit | |
JPS5431089A (en) | Vacuum metallizer | |
JPS544968A (en) | Production of molded plastic article having thin metallic film | |
JPS5315755A (en) | Manufacture of display panel electrode | |
JPS5421274A (en) | Chromium plate | |
JPS5395884A (en) | Evaporating method and apparatus | |
JPS5399082A (en) | High frequency sputtering apparatus | |
JPS5387720A (en) | Positive type radiation sensitive material | |
JPS5217892A (en) | Method of detecting impurities in liquid | |
JPS5435176A (en) | Depositing method by vacuum evaporation | |
JPS5395085A (en) | Velocity measuring system | |
DELGROSSO et al. | Lightweight gearbox development for propeller gearbox systems applications. Phase 1: Developments of ion-sputtered coatings for titanium alloy gears(Ion sputtering process used to deposit coating compounds on titanium alloy gear teeth)[Technical Report, Feb. 1970- 31 Mar. 1971] | |
JPS5423584A (en) | Pulse count type speed detector | |
JPS537584A (en) | Sputtering apparatus | |
JPS5421445A (en) | Thick coatiang of high-viscosity coating compound | |
JPS5375775A (en) | Alignment unit | |
JPS5344081A (en) | Analyzer using magnetic optical effect | |
JPS5421897A (en) | Mumidity detecting apparatus | |
JPS5396872A (en) | Coating weight measuring method of powder | |
JPS5374362A (en) | Wiring structure for electronic parts | |
JPS5421447A (en) | Automatic coater for numbering | |
JPS5287436A (en) | Method of electrodeposition coating and caoting tank thereof | |
JPS51122140A (en) | A process for manufacturing a coated metal having a coat of uniform th ickness |