JPS54161881A - Shifting tool of semiconductor wafer - Google Patents

Shifting tool of semiconductor wafer

Info

Publication number
JPS54161881A
JPS54161881A JP7113678A JP7113678A JPS54161881A JP S54161881 A JPS54161881 A JP S54161881A JP 7113678 A JP7113678 A JP 7113678A JP 7113678 A JP7113678 A JP 7113678A JP S54161881 A JPS54161881 A JP S54161881A
Authority
JP
Japan
Prior art keywords
carrier
board
pitch
shift
carriers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7113678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614187B2 (https=
Inventor
Teruo Kozai
Hiroshi Suzuki
Toshio Matsubayashi
Yoshitaka Hayata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7113678A priority Critical patent/JPS54161881A/ja
Publication of JPS54161881A publication Critical patent/JPS54161881A/ja
Publication of JPS614187B2 publication Critical patent/JPS614187B2/ja
Granted legal-status Critical Current

Links

JP7113678A 1978-06-12 1978-06-12 Shifting tool of semiconductor wafer Granted JPS54161881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7113678A JPS54161881A (en) 1978-06-12 1978-06-12 Shifting tool of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7113678A JPS54161881A (en) 1978-06-12 1978-06-12 Shifting tool of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS54161881A true JPS54161881A (en) 1979-12-21
JPS614187B2 JPS614187B2 (https=) 1986-02-07

Family

ID=13451854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7113678A Granted JPS54161881A (en) 1978-06-12 1978-06-12 Shifting tool of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54161881A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63126780U (https=) * 1987-02-05 1988-08-18

Also Published As

Publication number Publication date
JPS614187B2 (https=) 1986-02-07

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