JPS54159871A - Small piece washing method - Google Patents
Small piece washing methodInfo
- Publication number
- JPS54159871A JPS54159871A JP6941078A JP6941078A JPS54159871A JP S54159871 A JPS54159871 A JP S54159871A JP 6941078 A JP6941078 A JP 6941078A JP 6941078 A JP6941078 A JP 6941078A JP S54159871 A JPS54159871 A JP S54159871A
- Authority
- JP
- Japan
- Prior art keywords
- adsorption head
- small piece
- air
- semiconductor wafer
- upper face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To remove completely water drops of a semiconductor wafer adsorption head by spraying air to the small piece adsorption head simultaneously with rotating the small piece adsorption head until a semiconductor wafer small piece is fixed.
CONSTITUTION: A short time from the supply of semiconductor wafer 2, which should be subjected to washing processing next, to the vacuum adsorption of semiconductor wafer 2 is utilized to spary air from air pipe 8, which has air passing hole 81 for air, N2, etc., onto the upper face of adsorption head 1, which is rotated in a high speed, simultaneously with rotating adsorption head 1 in a high speed of 1000 to 5000rpm. Therefore, water drops 61 and dirt stuck to the upper face of adsorption head 1 are removed completely, and the upper face of adsorption head 1 is always held clear.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6941078A JPS54159871A (en) | 1978-06-08 | 1978-06-08 | Small piece washing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6941078A JPS54159871A (en) | 1978-06-08 | 1978-06-08 | Small piece washing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54159871A true JPS54159871A (en) | 1979-12-18 |
Family
ID=13401800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6941078A Pending JPS54159871A (en) | 1978-06-08 | 1978-06-08 | Small piece washing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54159871A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59134834A (en) * | 1983-01-21 | 1984-08-02 | Mitsubishi Electric Corp | Washing device for semiconductor wafer |
JPH06159507A (en) * | 1992-11-20 | 1994-06-07 | Power Reactor & Nuclear Fuel Dev Corp | Bellows |
-
1978
- 1978-06-08 JP JP6941078A patent/JPS54159871A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59134834A (en) * | 1983-01-21 | 1984-08-02 | Mitsubishi Electric Corp | Washing device for semiconductor wafer |
JPH0458179B2 (en) * | 1983-01-21 | 1992-09-16 | Mitsubishi Electric Corp | |
JPH06159507A (en) * | 1992-11-20 | 1994-06-07 | Power Reactor & Nuclear Fuel Dev Corp | Bellows |
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