JPS54156470A - Gas phase diffusion method - Google Patents
Gas phase diffusion methodInfo
- Publication number
- JPS54156470A JPS54156470A JP6531778A JP6531778A JPS54156470A JP S54156470 A JPS54156470 A JP S54156470A JP 6531778 A JP6531778 A JP 6531778A JP 6531778 A JP6531778 A JP 6531778A JP S54156470 A JPS54156470 A JP S54156470A
- Authority
- JP
- Japan
- Prior art keywords
- carrier gas
- gas phase
- phase diffusion
- impurity concentration
- diffusion method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To make average the difference in impurity concentration in the carrier gas toward the tube axis of diffusion furnace and to perform uniform gas phase diffusion, by alternately selecting the direction of introduction of carrier gas.
CONSTITUTION: The flow path of the impurity doping source 10 and the discharge system 11 is selected every given time by operating the valve 9 and the carrier gas is alternately introduced to the semiconductor substrate 3 from the both directions, then since the impurity concentration distribution is synthesized to constitute almost flat distribution and all the substrates are uniformly diffused.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6531778A JPS54156470A (en) | 1978-05-30 | 1978-05-30 | Gas phase diffusion method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6531778A JPS54156470A (en) | 1978-05-30 | 1978-05-30 | Gas phase diffusion method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54156470A true JPS54156470A (en) | 1979-12-10 |
Family
ID=13283404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6531778A Pending JPS54156470A (en) | 1978-05-30 | 1978-05-30 | Gas phase diffusion method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54156470A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011152510A1 (en) * | 2010-06-04 | 2011-12-08 | 信越化学工業株式会社 | Heat-treatment furnace |
-
1978
- 1978-05-30 JP JP6531778A patent/JPS54156470A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011152510A1 (en) * | 2010-06-04 | 2011-12-08 | 信越化学工業株式会社 | Heat-treatment furnace |
JP2012015501A (en) * | 2010-06-04 | 2012-01-19 | Shin Etsu Chem Co Ltd | Heat treatment furnace |
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