JPS54154983A - Forming method of metal wiring - Google Patents
Forming method of metal wiringInfo
- Publication number
- JPS54154983A JPS54154983A JP6364878A JP6364878A JPS54154983A JP S54154983 A JPS54154983 A JP S54154983A JP 6364878 A JP6364878 A JP 6364878A JP 6364878 A JP6364878 A JP 6364878A JP S54154983 A JPS54154983 A JP S54154983A
- Authority
- JP
- Japan
- Prior art keywords
- film
- pattern
- substrate
- coated
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6364878A JPS54154983A (en) | 1978-05-26 | 1978-05-26 | Forming method of metal wiring |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6364878A JPS54154983A (en) | 1978-05-26 | 1978-05-26 | Forming method of metal wiring |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54154983A true JPS54154983A (en) | 1979-12-06 |
Family
ID=13235371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6364878A Pending JPS54154983A (en) | 1978-05-26 | 1978-05-26 | Forming method of metal wiring |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54154983A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57204153A (en) * | 1981-06-10 | 1982-12-14 | Mitsubishi Electric Corp | Forming method for al or al alloy thin-film wiring |
US4381215A (en) * | 1980-05-27 | 1983-04-26 | Burroughs Corporation | Method of fabricating a misaligned, composite electrical contact on a semiconductor substrate |
-
1978
- 1978-05-26 JP JP6364878A patent/JPS54154983A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4381215A (en) * | 1980-05-27 | 1983-04-26 | Burroughs Corporation | Method of fabricating a misaligned, composite electrical contact on a semiconductor substrate |
JPS57204153A (en) * | 1981-06-10 | 1982-12-14 | Mitsubishi Electric Corp | Forming method for al or al alloy thin-film wiring |
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