JPS54143069A - Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit - Google Patents

Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit

Info

Publication number
JPS54143069A
JPS54143069A JP5120678A JP5120678A JPS54143069A JP S54143069 A JPS54143069 A JP S54143069A JP 5120678 A JP5120678 A JP 5120678A JP 5120678 A JP5120678 A JP 5120678A JP S54143069 A JPS54143069 A JP S54143069A
Authority
JP
Japan
Prior art keywords
projection image
signal
electron
motion
harmonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5120678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS562788B2 (enExample
Inventor
Nobuo Shimazu
Kiichi Takamoto
Korehito Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5120678A priority Critical patent/JPS54143069A/ja
Publication of JPS54143069A publication Critical patent/JPS54143069A/ja
Publication of JPS562788B2 publication Critical patent/JPS562788B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP5120678A 1978-04-28 1978-04-28 Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit Granted JPS54143069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5120678A JPS54143069A (en) 1978-04-28 1978-04-28 Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5120678A JPS54143069A (en) 1978-04-28 1978-04-28 Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit

Publications (2)

Publication Number Publication Date
JPS54143069A true JPS54143069A (en) 1979-11-07
JPS562788B2 JPS562788B2 (enExample) 1981-01-21

Family

ID=12880419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5120678A Granted JPS54143069A (en) 1978-04-28 1978-04-28 Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit

Country Status (1)

Country Link
JP (1) JPS54143069A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6229783U (enExample) * 1985-08-01 1987-02-23

Also Published As

Publication number Publication date
JPS562788B2 (enExample) 1981-01-21

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