JPS562788B2 - - Google Patents
Info
- Publication number
- JPS562788B2 JPS562788B2 JP5120678A JP5120678A JPS562788B2 JP S562788 B2 JPS562788 B2 JP S562788B2 JP 5120678 A JP5120678 A JP 5120678A JP 5120678 A JP5120678 A JP 5120678A JP S562788 B2 JPS562788 B2 JP S562788B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5120678A JPS54143069A (en) | 1978-04-28 | 1978-04-28 | Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5120678A JPS54143069A (en) | 1978-04-28 | 1978-04-28 | Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54143069A JPS54143069A (en) | 1979-11-07 |
| JPS562788B2 true JPS562788B2 (enExample) | 1981-01-21 |
Family
ID=12880419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5120678A Granted JPS54143069A (en) | 1978-04-28 | 1978-04-28 | Adjuster for turning angle of electron-beam projection image of electron-beam exposure unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54143069A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6229783U (enExample) * | 1985-08-01 | 1987-02-23 |
-
1978
- 1978-04-28 JP JP5120678A patent/JPS54143069A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6229783U (enExample) * | 1985-08-01 | 1987-02-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54143069A (en) | 1979-11-07 |