JPS54139493A - Manufacture of semiconductor device containing poly-crystal silicon layer - Google Patents

Manufacture of semiconductor device containing poly-crystal silicon layer

Info

Publication number
JPS54139493A
JPS54139493A JP4652778A JP4652778A JPS54139493A JP S54139493 A JPS54139493 A JP S54139493A JP 4652778 A JP4652778 A JP 4652778A JP 4652778 A JP4652778 A JP 4652778A JP S54139493 A JPS54139493 A JP S54139493A
Authority
JP
Japan
Prior art keywords
film
layer
poly
crystal
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4652778A
Other languages
English (en)
Other versions
JPS6040701B2 (ja
Inventor
Satoshi Meguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4652778A priority Critical patent/JPS6040701B2/ja
Publication of JPS54139493A publication Critical patent/JPS54139493A/ja
Publication of JPS6040701B2 publication Critical patent/JPS6040701B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4652778A 1978-04-21 1978-04-21 多結晶シリコン層を有する半導体装置の製法 Expired JPS6040701B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4652778A JPS6040701B2 (ja) 1978-04-21 1978-04-21 多結晶シリコン層を有する半導体装置の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4652778A JPS6040701B2 (ja) 1978-04-21 1978-04-21 多結晶シリコン層を有する半導体装置の製法

Publications (2)

Publication Number Publication Date
JPS54139493A true JPS54139493A (en) 1979-10-29
JPS6040701B2 JPS6040701B2 (ja) 1985-09-12

Family

ID=12749745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4652778A Expired JPS6040701B2 (ja) 1978-04-21 1978-04-21 多結晶シリコン層を有する半導体装置の製法

Country Status (1)

Country Link
JP (1) JPS6040701B2 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
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US11492255B2 (en) 2020-04-03 2022-11-08 Saudi Arabian Oil Company Steam methane reforming with steam regeneration
US11322766B2 (en) 2020-05-28 2022-05-03 Saudi Arabian Oil Company Direct hydrocarbon metal supported solid oxide fuel cell
US11639290B2 (en) 2020-06-04 2023-05-02 Saudi Arabian Oil Company Dry reforming of methane with carbon dioxide at elevated pressure
US11583824B2 (en) 2020-06-18 2023-02-21 Saudi Arabian Oil Company Hydrogen production with membrane reformer
US11492254B2 (en) 2020-06-18 2022-11-08 Saudi Arabian Oil Company Hydrogen production with membrane reformer
US11578016B1 (en) 2021-08-12 2023-02-14 Saudi Arabian Oil Company Olefin production via dry reforming and olefin synthesis in a vessel
US11617981B1 (en) 2022-01-03 2023-04-04 Saudi Arabian Oil Company Method for capturing CO2 with assisted vapor compression

Also Published As

Publication number Publication date
JPS6040701B2 (ja) 1985-09-12

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