JPS54137273A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS54137273A
JPS54137273A JP4568378A JP4568378A JPS54137273A JP S54137273 A JPS54137273 A JP S54137273A JP 4568378 A JP4568378 A JP 4568378A JP 4568378 A JP4568378 A JP 4568378A JP S54137273 A JPS54137273 A JP S54137273A
Authority
JP
Japan
Prior art keywords
scribing
alloy
layer
platinum silicide
yield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4568378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133257B2 (enrdf_load_stackoverflow
Inventor
Shigeyuki Yoshizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4568378A priority Critical patent/JPS54137273A/ja
Publication of JPS54137273A publication Critical patent/JPS54137273A/ja
Publication of JPS6133257B2 publication Critical patent/JPS6133257B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Dicing (AREA)
JP4568378A 1978-04-17 1978-04-17 Semiconductor device Granted JPS54137273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4568378A JPS54137273A (en) 1978-04-17 1978-04-17 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4568378A JPS54137273A (en) 1978-04-17 1978-04-17 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS54137273A true JPS54137273A (en) 1979-10-24
JPS6133257B2 JPS6133257B2 (enrdf_load_stackoverflow) 1986-08-01

Family

ID=12726185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4568378A Granted JPS54137273A (en) 1978-04-17 1978-04-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS54137273A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5780719A (en) * 1980-11-07 1982-05-20 Fujitsu Ltd Semiconductor device
JP2021531415A (ja) * 2018-07-27 2021-11-18 テキサス インスツルメンツ インコーポレイテッド 合金化すること及びプラチナ合金をエッチングすることによるプラチナのパターン化

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926740A (enrdf_load_stackoverflow) * 1972-07-04 1974-03-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926740A (enrdf_load_stackoverflow) * 1972-07-04 1974-03-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5780719A (en) * 1980-11-07 1982-05-20 Fujitsu Ltd Semiconductor device
JP2021531415A (ja) * 2018-07-27 2021-11-18 テキサス インスツルメンツ インコーポレイテッド 合金化すること及びプラチナ合金をエッチングすることによるプラチナのパターン化

Also Published As

Publication number Publication date
JPS6133257B2 (enrdf_load_stackoverflow) 1986-08-01

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