JPS54119281A - Thermography apparatus - Google Patents

Thermography apparatus

Info

Publication number
JPS54119281A
JPS54119281A JP2686178A JP2686178A JPS54119281A JP S54119281 A JPS54119281 A JP S54119281A JP 2686178 A JP2686178 A JP 2686178A JP 2686178 A JP2686178 A JP 2686178A JP S54119281 A JPS54119281 A JP S54119281A
Authority
JP
Japan
Prior art keywords
window
box body
infrared rays
incident
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2686178A
Other languages
Japanese (ja)
Inventor
Takashi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2686178A priority Critical patent/JPS54119281A/en
Publication of JPS54119281A publication Critical patent/JPS54119281A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0831—Masks; Aperture plates; Spatial light modulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0044—Furnaces, ovens, kilns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0875—Windows; Arrangements for fastening thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/047—Mobile mounting; Scanning arrangements

Abstract

PURPOSE:To reduce the area of observation window by putting the scanning origin by a detector of infrared rays incident through the window in the position of the window. CONSTITUTION:The infrared rays from the in-furnace high temperature objects, etc. incident to a see-through window 1 such as of silicon or the like provided to a furnace wall 2 is focused by the condensing mirror 5, vibrating mirror 6, lens 7, etc. of a box body 8 and is detected with a detector 4. The incident infrared rays are scanned in the two orthogonal directions by the reciprocating motion within a fixed angle range centering at the central part O of the vibrating mirror 6 turning about the axis P and the window 1 of the box body 8. Making this window 1 the scanning origin obviates the decrease in the field of observation despite the reduction in the size of the window 1 in the scanning direction of the box body 8 and enables the window 1 to be the one of a smaller area. As a result, the thermography apparatus may be constituted with the wondow of a small area and high strength and the small size cleaning device.
JP2686178A 1978-03-09 1978-03-09 Thermography apparatus Pending JPS54119281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2686178A JPS54119281A (en) 1978-03-09 1978-03-09 Thermography apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2686178A JPS54119281A (en) 1978-03-09 1978-03-09 Thermography apparatus

Publications (1)

Publication Number Publication Date
JPS54119281A true JPS54119281A (en) 1979-09-17

Family

ID=12205061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2686178A Pending JPS54119281A (en) 1978-03-09 1978-03-09 Thermography apparatus

Country Status (1)

Country Link
JP (1) JPS54119281A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197430A (en) * 1981-05-07 1982-12-03 Bergwerksverband Gmbh Measuring device for temperature distribution of wall surface in axial space

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197430A (en) * 1981-05-07 1982-12-03 Bergwerksverband Gmbh Measuring device for temperature distribution of wall surface in axial space
JPH0240171B2 (en) * 1981-05-07 1990-09-10 Bergwerksverband Gmbh

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