JPS54110942A - Manufacture of mold for formation - Google Patents
Manufacture of mold for formationInfo
- Publication number
- JPS54110942A JPS54110942A JP1869878A JP1869878A JPS54110942A JP S54110942 A JPS54110942 A JP S54110942A JP 1869878 A JP1869878 A JP 1869878A JP 1869878 A JP1869878 A JP 1869878A JP S54110942 A JPS54110942 A JP S54110942A
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- coated over
- film
- insulating film
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To simplify the manufacturing process of mold with fine patterns and also to reduce the manufacturing cost by the procedure in which an insulation g film provided on a silicon base plate is carved by a stepwise etching treatment to form predetermined grooves by means of a photo-engraving method, and then a resin is coated over the grooves in such a way that the sectional area of the grooves becomes an almost semicylindrical shape.
CONSTITUTION: The insulating film 2 is formed on the silicon base plate 1, and then an etching resistant film is further coated over the insulating film 2. Then, the ethcing resistant film is exposed to light through a mask with a predetermined pattern and then subjected to a developing treatment. Then, it is dipped into an etching liquid to form the etched groove 3 on the insulating film 2. In order to make the groove as spherical as possible, the same operation is made to form the groove 4. Subsequently, in order to smooth the their between the grooves 3 and 4, the resin 5 is coated over the tier and then the metal film 6 is coated over the resin coat. Thus, the process of manufacturing molds with highly accurate fine pattern can be simplified and the manufacturing cost reduced.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1869878A JPS5952707B2 (en) | 1978-02-21 | 1978-02-21 | Manufacturing method for molding molds |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1869878A JPS5952707B2 (en) | 1978-02-21 | 1978-02-21 | Manufacturing method for molding molds |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54110942A true JPS54110942A (en) | 1979-08-30 |
| JPS5952707B2 JPS5952707B2 (en) | 1984-12-21 |
Family
ID=11978840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1869878A Expired JPS5952707B2 (en) | 1978-02-21 | 1978-02-21 | Manufacturing method for molding molds |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5952707B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59214623A (en) * | 1983-05-20 | 1984-12-04 | Nippon Kogaku Kk <Nikon> | Mold for molding fine pattern of plastic |
| JPS6132718A (en) * | 1984-07-25 | 1986-02-15 | Matsushita Electric Works Ltd | Preparation of mold for molding synthetic resin |
| JPH0224122A (en) * | 1988-07-13 | 1990-01-26 | Mitsui Eng & Shipbuild Co Ltd | Treatment for making optical shaped body transparent |
-
1978
- 1978-02-21 JP JP1869878A patent/JPS5952707B2/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59214623A (en) * | 1983-05-20 | 1984-12-04 | Nippon Kogaku Kk <Nikon> | Mold for molding fine pattern of plastic |
| JPH0361565B2 (en) * | 1983-05-20 | 1991-09-20 | Nippon Kogaku Kk | |
| JPS6132718A (en) * | 1984-07-25 | 1986-02-15 | Matsushita Electric Works Ltd | Preparation of mold for molding synthetic resin |
| JPH0224122A (en) * | 1988-07-13 | 1990-01-26 | Mitsui Eng & Shipbuild Co Ltd | Treatment for making optical shaped body transparent |
| JPH0479826B2 (en) * | 1988-07-13 | 1992-12-17 | Mitsui Shipbuilding Eng |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5952707B2 (en) | 1984-12-21 |
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