JPS54106172A - Forming method of semiconductor element electrode - Google Patents
Forming method of semiconductor element electrodeInfo
- Publication number
- JPS54106172A JPS54106172A JP1298778A JP1298778A JPS54106172A JP S54106172 A JPS54106172 A JP S54106172A JP 1298778 A JP1298778 A JP 1298778A JP 1298778 A JP1298778 A JP 1298778A JP S54106172 A JPS54106172 A JP S54106172A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- reflected light
- light
- semiconductor element
- bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1298778A JPS54106172A (en) | 1978-02-09 | 1978-02-09 | Forming method of semiconductor element electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1298778A JPS54106172A (en) | 1978-02-09 | 1978-02-09 | Forming method of semiconductor element electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54106172A true JPS54106172A (en) | 1979-08-20 |
Family
ID=11820546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1298778A Pending JPS54106172A (en) | 1978-02-09 | 1978-02-09 | Forming method of semiconductor element electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54106172A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02213132A (ja) * | 1988-12-09 | 1990-08-24 | American Teleph & Telegr Co <Att> | 集積回路デバイス金属化層のエッチング及び結果としてのデバイス |
-
1978
- 1978-02-09 JP JP1298778A patent/JPS54106172A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02213132A (ja) * | 1988-12-09 | 1990-08-24 | American Teleph & Telegr Co <Att> | 集積回路デバイス金属化層のエッチング及び結果としてのデバイス |
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