JPS54106167A - Dope agent for semiconductor substrate - Google Patents
Dope agent for semiconductor substrateInfo
- Publication number
- JPS54106167A JPS54106167A JP1298578A JP1298578A JPS54106167A JP S54106167 A JPS54106167 A JP S54106167A JP 1298578 A JP1298578 A JP 1298578A JP 1298578 A JP1298578 A JP 1298578A JP S54106167 A JPS54106167 A JP S54106167A
- Authority
- JP
- Japan
- Prior art keywords
- solution
- semiconductor substrate
- dope
- dope agent
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To dope the platnum to the substrate by using the alcohol solution of silicon tetrahydroxide containing the aqueous solution of the chloroplatinic acid.
CONSTITUTION: The solution can be dissolved with ethanol of Si(OH)4 and thus dissolved with the aqueous solution of H2PtCl6.6H2O. This solution varies as Si(OH)4→ SiO2 + H2O at the normal temperature or higher temperature to form the SiO2 film. With this dope agent, Pt can be diffused in a desired amount with the extremely high reproducibility. Then the solution is applied and then heated up in the inactive gas.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1298578A JPS54106167A (en) | 1978-02-09 | 1978-02-09 | Dope agent for semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1298578A JPS54106167A (en) | 1978-02-09 | 1978-02-09 | Dope agent for semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54106167A true JPS54106167A (en) | 1979-08-20 |
Family
ID=11820488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1298578A Pending JPS54106167A (en) | 1978-02-09 | 1978-02-09 | Dope agent for semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54106167A (en) |
-
1978
- 1978-02-09 JP JP1298578A patent/JPS54106167A/en active Pending
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