JPS54106100A - Vapor phase chemically depositing method for silicon carbide - Google Patents

Vapor phase chemically depositing method for silicon carbide

Info

Publication number
JPS54106100A
JPS54106100A JP1324178A JP1324178A JPS54106100A JP S54106100 A JPS54106100 A JP S54106100A JP 1324178 A JP1324178 A JP 1324178A JP 1324178 A JP1324178 A JP 1324178A JP S54106100 A JPS54106100 A JP S54106100A
Authority
JP
Japan
Prior art keywords
substrate
vapor phase
gas
press
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1324178A
Other languages
English (en)
Other versions
JPS6115150B2 (ja
Inventor
Toshiki Inooku
Takeshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1324178A priority Critical patent/JPS54106100A/ja
Publication of JPS54106100A publication Critical patent/JPS54106100A/ja
Publication of JPS6115150B2 publication Critical patent/JPS6115150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1324178A 1978-02-07 1978-02-07 Vapor phase chemically depositing method for silicon carbide Granted JPS54106100A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1324178A JPS54106100A (en) 1978-02-07 1978-02-07 Vapor phase chemically depositing method for silicon carbide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1324178A JPS54106100A (en) 1978-02-07 1978-02-07 Vapor phase chemically depositing method for silicon carbide

Publications (2)

Publication Number Publication Date
JPS54106100A true JPS54106100A (en) 1979-08-20
JPS6115150B2 JPS6115150B2 (ja) 1986-04-22

Family

ID=11827693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1324178A Granted JPS54106100A (en) 1978-02-07 1978-02-07 Vapor phase chemically depositing method for silicon carbide

Country Status (1)

Country Link
JP (1) JPS54106100A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016895A (ja) * 1983-07-06 1985-01-28 Sanyo Electric Co Ltd ＳｉＣ単結晶積層体及びその製造方法
JPS62138398A (ja) * 1985-12-13 1987-06-22 Agency Of Ind Science & Technol 炭化けい素単結晶の製造法
US6299683B1 (en) * 1996-01-30 2001-10-09 Siemens Aktiengesellschaft Method and apparatus for the production of SiC by means of CVD with improved gas utilization
CN105632901A (zh) * 2016-02-02 2016-06-01 北京华进创威电子有限公司 一种采用干式刻蚀方法获得碳化硅衬底的方法
JP2021004786A (ja) * 2019-06-26 2021-01-14 住友金属鉱山株式会社 四塩化ケイ素の測定ユニット、四塩化ケイ素の品質評価方法、四塩化ケイ素の品質管理方法、炭化ケイ素基板の製造方法、および、炭化ケイ素基板製造装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016895A (ja) * 1983-07-06 1985-01-28 Sanyo Electric Co Ltd ＳｉＣ単結晶積層体及びその製造方法
JPS62138398A (ja) * 1985-12-13 1987-06-22 Agency Of Ind Science & Technol 炭化けい素単結晶の製造法
US6299683B1 (en) * 1996-01-30 2001-10-09 Siemens Aktiengesellschaft Method and apparatus for the production of SiC by means of CVD with improved gas utilization
CN105632901A (zh) * 2016-02-02 2016-06-01 北京华进创威电子有限公司 一种采用干式刻蚀方法获得碳化硅衬底的方法
JP2021004786A (ja) * 2019-06-26 2021-01-14 住友金属鉱山株式会社 四塩化ケイ素の測定ユニット、四塩化ケイ素の品質評価方法、四塩化ケイ素の品質管理方法、炭化ケイ素基板の製造方法、および、炭化ケイ素基板製造装置

Also Published As

Publication number Publication date
JPS6115150B2 (ja) 1986-04-22

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