JPS5396676A - Method and apparatus for positioning by electron beam exposure - Google Patents
Method and apparatus for positioning by electron beam exposureInfo
- Publication number
- JPS5396676A JPS5396676A JP1026077A JP1026077A JPS5396676A JP S5396676 A JPS5396676 A JP S5396676A JP 1026077 A JP1026077 A JP 1026077A JP 1026077 A JP1026077 A JP 1026077A JP S5396676 A JPS5396676 A JP S5396676A
- Authority
- JP
- Japan
- Prior art keywords
- positioning
- electron beam
- beam exposure
- deteriorating
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1026077A JPS5396676A (en) | 1977-02-03 | 1977-02-03 | Method and apparatus for positioning by electron beam exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1026077A JPS5396676A (en) | 1977-02-03 | 1977-02-03 | Method and apparatus for positioning by electron beam exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5396676A true JPS5396676A (en) | 1978-08-24 |
JPS6142408B2 JPS6142408B2 (ja) | 1986-09-20 |
Family
ID=11745335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1026077A Granted JPS5396676A (en) | 1977-02-03 | 1977-02-03 | Method and apparatus for positioning by electron beam exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5396676A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6010727A (ja) * | 1983-06-30 | 1985-01-19 | Toshiba Corp | 位置合わせ方法 |
-
1977
- 1977-02-03 JP JP1026077A patent/JPS5396676A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6010727A (ja) * | 1983-06-30 | 1985-01-19 | Toshiba Corp | 位置合わせ方法 |
JPH0580814B2 (ja) * | 1983-06-30 | 1993-11-10 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS6142408B2 (ja) | 1986-09-20 |
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