Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co LtdfiledCriticalNEC Home Electronics Ltd
Priority to JP1013077ApriorityCriticalpatent/JPS5395569A/en
Publication of JPS5395569ApublicationCriticalpatent/JPS5395569A/en
PURPOSE: To prevent wafers from contacting each other, by inserting the dummy wafer having insulating film between the wafers in which phosphorus is diffused in high concentration and processing by pushing in operation.
COPYRIGHT: (C)1978,JPO&Japio
JP1013077A1977-01-311977-01-31Manufacture for semiconductor device
PendingJPS5395569A
(en)