JPS5391674A - Manufacture for insulating gate field effect transistor - Google Patents

Manufacture for insulating gate field effect transistor

Info

Publication number
JPS5391674A
JPS5391674A JP656677A JP656677A JPS5391674A JP S5391674 A JPS5391674 A JP S5391674A JP 656677 A JP656677 A JP 656677A JP 656677 A JP656677 A JP 656677A JP S5391674 A JPS5391674 A JP S5391674A
Authority
JP
Japan
Prior art keywords
manufacture
field effect
effect transistor
gate field
insulating gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP656677A
Other languages
Japanese (ja)
Inventor
Michihiro Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP656677A priority Critical patent/JPS5391674A/en
Publication of JPS5391674A publication Critical patent/JPS5391674A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce the MOS IC less in dispersion for the performance and with high reliability, by making ion injection before the formation of the gate insulating film.
COPYRIGHT: (C)1978,JPO&Japio
JP656677A 1977-01-24 1977-01-24 Manufacture for insulating gate field effect transistor Pending JPS5391674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP656677A JPS5391674A (en) 1977-01-24 1977-01-24 Manufacture for insulating gate field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP656677A JPS5391674A (en) 1977-01-24 1977-01-24 Manufacture for insulating gate field effect transistor

Publications (1)

Publication Number Publication Date
JPS5391674A true JPS5391674A (en) 1978-08-11

Family

ID=11641874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP656677A Pending JPS5391674A (en) 1977-01-24 1977-01-24 Manufacture for insulating gate field effect transistor

Country Status (1)

Country Link
JP (1) JPS5391674A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954268A (en) * 1982-09-21 1984-03-29 Nec Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954268A (en) * 1982-09-21 1984-03-29 Nec Corp Manufacture of semiconductor device

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