JPS5391674A - Manufacture for insulating gate field effect transistor - Google Patents
Manufacture for insulating gate field effect transistorInfo
- Publication number
- JPS5391674A JPS5391674A JP656677A JP656677A JPS5391674A JP S5391674 A JPS5391674 A JP S5391674A JP 656677 A JP656677 A JP 656677A JP 656677 A JP656677 A JP 656677A JP S5391674 A JPS5391674 A JP S5391674A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- field effect
- effect transistor
- gate field
- insulating gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To produce the MOS IC less in dispersion for the performance and with high reliability, by making ion injection before the formation of the gate insulating film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP656677A JPS5391674A (en) | 1977-01-24 | 1977-01-24 | Manufacture for insulating gate field effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP656677A JPS5391674A (en) | 1977-01-24 | 1977-01-24 | Manufacture for insulating gate field effect transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5391674A true JPS5391674A (en) | 1978-08-11 |
Family
ID=11641874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP656677A Pending JPS5391674A (en) | 1977-01-24 | 1977-01-24 | Manufacture for insulating gate field effect transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5391674A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5954268A (en) * | 1982-09-21 | 1984-03-29 | Nec Corp | Manufacture of semiconductor device |
-
1977
- 1977-01-24 JP JP656677A patent/JPS5391674A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5954268A (en) * | 1982-09-21 | 1984-03-29 | Nec Corp | Manufacture of semiconductor device |
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