JPS5389372A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5389372A JPS5389372A JP15918876A JP15918876A JPS5389372A JP S5389372 A JPS5389372 A JP S5389372A JP 15918876 A JP15918876 A JP 15918876A JP 15918876 A JP15918876 A JP 15918876A JP S5389372 A JPS5389372 A JP S5389372A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- wafer
- dividedly
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To improve the contact between mask and wafer and obtain fine patterns at high accuracy by dividedly performing exposure and providing quiescent period in-between in order to exhaust the nitrogen gas evolved from photo resist to the outside of the wafer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15918876A JPS5389372A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15918876A JPS5389372A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5389372A true JPS5389372A (en) | 1978-08-05 |
JPS5538050B2 JPS5538050B2 (en) | 1980-10-02 |
Family
ID=15688225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15918876A Granted JPS5389372A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5389372A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6158013A (en) * | 1984-08-29 | 1986-03-25 | Hitachi Ltd | Positioning control system |
-
1976
- 1976-12-28 JP JP15918876A patent/JPS5389372A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6158013A (en) * | 1984-08-29 | 1986-03-25 | Hitachi Ltd | Positioning control system |
Also Published As
Publication number | Publication date |
---|---|
JPS5538050B2 (en) | 1980-10-02 |
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