JPS5387668A - Forming method of patterns - Google Patents

Forming method of patterns

Info

Publication number
JPS5387668A
JPS5387668A JP258677A JP258677A JPS5387668A JP S5387668 A JPS5387668 A JP S5387668A JP 258677 A JP258677 A JP 258677A JP 258677 A JP258677 A JP 258677A JP S5387668 A JPS5387668 A JP S5387668A
Authority
JP
Japan
Prior art keywords
patterns
forming method
film
substance thin
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP258677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5615569B2 (enrdf_load_stackoverflow
Inventor
Hiromi Yoshida
Masataka Miyamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP258677A priority Critical patent/JPS5387668A/ja
Publication of JPS5387668A publication Critical patent/JPS5387668A/ja
Publication of JPS5615569B2 publication Critical patent/JPS5615569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP258677A 1977-01-13 1977-01-13 Forming method of patterns Granted JPS5387668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP258677A JPS5387668A (en) 1977-01-13 1977-01-13 Forming method of patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP258677A JPS5387668A (en) 1977-01-13 1977-01-13 Forming method of patterns

Publications (2)

Publication Number Publication Date
JPS5387668A true JPS5387668A (en) 1978-08-02
JPS5615569B2 JPS5615569B2 (enrdf_load_stackoverflow) 1981-04-10

Family

ID=11533469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP258677A Granted JPS5387668A (en) 1977-01-13 1977-01-13 Forming method of patterns

Country Status (1)

Country Link
JP (1) JPS5387668A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691428A (en) * 1979-11-27 1981-07-24 Western Electric Co Composite resist and method of forming pattern in composite resist
JPS58218119A (ja) * 1982-06-14 1983-12-19 Hitachi Ltd パタ−ン形成方法
JPH02225214A (ja) * 1989-02-28 1990-09-07 Tokyo Electron Ltd ロード・アンロード装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62178448U (enrdf_load_stackoverflow) * 1986-05-06 1987-11-12

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691428A (en) * 1979-11-27 1981-07-24 Western Electric Co Composite resist and method of forming pattern in composite resist
JPS58218119A (ja) * 1982-06-14 1983-12-19 Hitachi Ltd パタ−ン形成方法
JPH02225214A (ja) * 1989-02-28 1990-09-07 Tokyo Electron Ltd ロード・アンロード装置

Also Published As

Publication number Publication date
JPS5615569B2 (enrdf_load_stackoverflow) 1981-04-10

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